摘要
类金刚石膜 (DL C)是由无定形碳和金刚石相混合组成的碳材料 ,由于具有与金刚石膜 (DF)相类似的性能——优异的机械特性、电学特性、光学特性、热学和化学特性以及生物相溶性 ,同时制备方法相对容易实现 ,因此引起人们极大兴趣 ,现在已经应用到很多领域。本文将简要介绍类金刚石膜的性能。
Diamond like carbon film(DLC) is a carbon material which consists of a mixture of amorphous and crystalline phases. Because DLC film has excellent mechanical, electric, optical, thermal, biocompatible properties which are similar to diamond film(DF), meanwhile the fabrication of DLC film is easy to be achieved , people have great interests in it. Now DLC film has been used in many fields. The properties, the applications and the deposition methods of DLC film will be briefly discussed in the paper.
出处
《真空》
CAS
北大核心
2002年第5期27-31,共5页
Vacuum
