摘要
电容式湿度传感器不断发展的同时上电极的制造工艺也在不断进行着技术更新,为了使湿度传感器的透水性更加优越,上电极在不断地被做薄,同时在多孔研究方面也在不断地进行着优化,但凡关于多孔上电极受力可靠性的问题,总是涉及到制作栅条过程中因为过度腐蚀而断裂的现象。利用ANSYS针对传统的条栅形多孔上电极以及自行设计的环形多孔上电极进行模拟受力分析,通过对多孔上电极内壁面进行压力加载,来模拟光刻过程中过度腐蚀的状况,观察比较两种上电极的模拟受力情况。从得到的受力形变图,等效塑性应变图以及等效应力图分析得出,环形多孔上电极具备比条栅形多孔上电极更可靠的受力响应。
Capacitive humidity sensor is growing at the same time,the manufacturing process of electrodes in the ongoing technology updates,in order to make the permeability of humidity sensor is more superior,the electrodes in being thin,at the same time,the research on porosity is being optimized,any questions about the reliability of the porous electrode force on,bars are always involved in making the process because of the excessive corrosion and fracture phenomenon.Using ANSYS for traditional gridiron porous electrodes and designed to simulate the circular on the porous electrode force analysis,through pressuring load on the wall inside the porous electrodes,to simulate the lithography process excessive corrosion condition,compare two kinds of electrodes on the simulated stress conditions.According to the analysis of the total deformation diagram,the equivalent plastic strain diagram and the equivalent stress diagram,it is concluded that the force response of the electrode on the ring porous electrode is more reliable than that on the gridiron porous electrode.
作者
高翔
禹胜林
张弛
GAO Xiang;YU Shenglin;ZHANG Chi(School of Electronic and Information Engineering,Nanjing University of Information Science and Technology,Nanjing 210044,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2018年第10期1511-1515,共5页
Chinese Journal of Sensors and Actuators
关键词
电容式湿度传感器
多孔上电极
可靠性
capacitive humidity sensor
porous upper electrodes
reliability
