摘要
针对环形振动陀螺结构对称、模态特性参数相同与抗干扰特性好的特点,提出了一种新型的电容式环形微机电振动陀螺。设计了S形弹性支撑梁形式的硅基环形振动陀螺敏感结构,并仿真分析了陀螺的工作模态与幅频响应特性。根据环形振动陀螺的动力学特性,研究了陀螺的机电接口形式与硅基电极的设置方法,建立了硅基电极的电学参数模型与陀螺的角速度敏感模型。基于深离子刻蚀技术设计了简单可行的传感器制备流程,并成功制备了陀螺的敏感结构。实验测试结果显示,该环形微机电振动陀螺驱动与检测模态的谐振频率分别为9 028.86Hz与9 036.15Hz,品质因数分别为25 051与25 026,标度因数为0.589 7mV/((°)·s^(-1))。实验结果验证了陀螺设计与研究方法的正确性,为高性能硅基微机电陀螺的研制提供了一种可行的方案。
A novel MEMS capacitive vibrating ring gyroscope was proposed in this paper based on the advantageous of the ring gyroscope: symmetric resonator, identical mode parameters and excellent anti-interference ability. The sensitive structure of silicon-based capacitive vibrating ring gyroscope with S-shaped elastic supporting beams was designed, and the operating mode and amplitude-frequency response characteristics of the gyroscope were simulated and analyzed. The electromechanical interface and the silicon electrodes setting of the gyroscope were studied, and the electrical parameter model of silicon-based electrodes and theoretical model of gyroscope angular velocity detection were established according to its dynamic characteristics. A simple and feasible processing flow of the gyroscope was prepared by using DRIE technology, and the gyroscope prototype was manufactured successfully. Test results show that the resonance frequency of the gyroscope are 9 028.86 Hz and 9 036.15 Hz with Q -factors of 25 051 and 25 026 in vacuum packaged, respectively, and the scale factor is 0.589 7 mV/((°)·s^-1 ). The experimental results demonstrate the validity and feasibility of the proposed method, which provides an approach to the high-performance silicon-based MEMS gyroscope.
作者
寇志伟
曹慧亮
石云波
张英杰
刘俊
KOU Zhi-wei;CAO Hui-liang;SHI Yun-bo;ZHANG Ying-jie;LIU Jun(Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China;College of Electric Power, Inner Mongolia University of Technology, Hohhot 010051, China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2019年第4期842-848,共7页
Optics and Precision Engineering
基金
国家自然科学基金国家重大科研仪器研制项目(No.51727808)
国家自然科学基金资助项目(No.51705477)
山西省留学回国人员科技活动择优资助项目(重点)(No.2018-008)
中北大学电子测试技术重点实验室开放基金资助项目(No.ZDSYSJ2015004)
毁伤技术国防重点学科实验室开放基金资助项目(No.DXMBJJ2017-15)
关键词
微机电系统
环形微机电陀螺
敏感结构
电容电极
加工工艺
Micro-Electro-Mechanical System(MEMS)
vibrating ring gyroscope
sensitive structure
capacitor electrode
manufacturing process
