摘要
石墨烯具有比表面积大、弹性模量大、刚度大和密度低等特性,是极佳的纳机电系统(NEMS)基础材料。石墨烯纳机电系统主要研究石墨烯薄膜的机电性能,其共振频率对质量、力和热具有非常灵敏的响应,在传感领域具有广泛的应用前景。光纤传感器已得到广泛应用,二者相结合能够发挥更大的优势。本文主要对石墨烯纳机电系统的工作原理、制备工艺、传感应用和基于光纤的石墨烯纳机电系统传感器进行了综述与展望。
Graphene is an excellent base material for a nanoelectromechanical system(NEMS)because of its extraordinary characteristics,including a large specific surface area,high Young s modulus,enormous stiffness,and low density.The graphene NEMS mainly studies the electromechanical properties of graphene films.Its resonant frequency has a very sensitive response to mass,force,and heat,which has a great application prospect in the sensing field.Meanwhile,the optical fiber sensor has been widely studied and applied,whose combination with graphene can possess a greater advantage.In this paper,the working principle,preparation process,sensing application of the graphene NEMS as well as the fiber-based graphene NEMS sensors are reviewed and prospected.
作者
刘增勇
曹鸿谦
徐飞
陆延青
Liu Zengyong;Cao Hongqian;Xu Fei;Lu Yanqing(College of Engineering and Applied Science,Nanjing University,Nanjing,Jiangsu 210093,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2019年第11期38-45,共8页
Laser & Optoelectronics Progress
基金
科技部国家重点研发计划课题(2017YFC1403800)
国家自然科学基金重点项目(61535005)
关键词
光纤光学
石墨烯
纳机电系统
光纤
传感
fiber optics
graphene
nano-electromechanical system
optical fiber
sensing
