摘要
在机床导轨调整、小角度测量及直线度与平面度测量等应用中,水平仪是一种重要测量工具。基于光的折射与反射原理,设计了一种光路简单、易于调整、结构稳定、精度较高且低成本的双轴光电水平仪。首先,介绍了水平仪的角度测量原理、光路及结构设计,并对光学件的夹具底座和水平仪整体结构分别进行了热变形分析与模态仿真分析。然后,进行了水平仪的标定实验、稳定性实验及测量重复性实验。最后,提出了一种简单、快速测量平板平面度的新方法,并进行实验验证。实验结果表明:水平仪两个方向在±100″量程内的标定误差均小于±0.6″;漂移量小于0.5″/h;测量重复性为0.4″;测得平板玻璃局部平面的平面度误差值为23.742μm。
As a high-precision measurement instrument,the level finds many applications in machine guide adjustment,small angle measurement,straightness and flatness measurement.Based on the principle of light refraction and reflection,a dual-axis photoelectric level was designed,which has the advantage such as simple optical path,stable structure,high precision and low cost.Firstly,the angle measurement principle,optical path and structural design of the level were introduced.The thermal deformation analysis on the fixture holders was implemented.The modal simulation analysis on the level structure was carried out.In addition,the calibration experiment,stability experiment and measurement repeatability experiment of the level meter were carried out.Finally,a simple and efficient method was proposed to measure the plate flatness.In order to verify the feasibility of this method,an experiment was designed.The experimental results show that the calibration errors of two directions are better than±0.6″in the measuring range of±100″,the measurement stability is better than 0.5″/h,and the measurement repeatability is within 0.4″,the flatness error of the flat plane is 23.742μm.
作者
李影
娄志峰
田雨辰
徐良
LI Ying;LOU Zhifeng;TIAN Yuchen;XU Liang
出处
《现代机械》
2019年第4期57-62,共6页
Modern Machinery
关键词
水平仪
稳定性
测量重复性
平面度测量
optoelectronic level
stability
measurement repeatability
flatness measurement
