摘要
采用甲基丙烯酸酯共聚物制备光敏导电银浆,利用偏光显微镜和扫描电镜研究了共聚物的分子量和酸值对光敏银浆光刻性能的影响。研究结果表明:合成的共聚物能够满足光敏银浆的要求,其分子量过小或酸值过大,均会引起膜层附着力下降,导致光刻电极边缘锯齿、断线或脱落;反之,会造成光刻电极分辨率低。通过研究发现,分子量为60000、酸值为62 mg KOH/g的甲基丙烯酸树脂制备的光敏银浆通过光刻工艺后可以得到高分辨率的电极图形,高温烧结后电极表面致密,边缘无翘曲现象,可以很好地保证电极的可靠性。
The methacrylic copolymer was synthesized by means of solution copolymerization.The effects of molecular weight and acid value of the copolymer on the developing properties of photosensitive silver paste were studied by means of polarizing microscope and SEM.The results show that the synthetic resin can meet the requirements of photosensitive silver paste.If the molecular weight of the resin is too small or the acid value is too high,the adhesion of the film will decrease,and the electrode lines will be easily serrated,broken or dropped.On the contrary,the electrode pattern is difficult to develop,resulting in low resolution of the electrode.It was found that the photosensitive silver paste with molecular weight of 60000 and acid value of 60 mg KOH/g could obtain high resolution electrode pattern by developing.After sintering at high temperature,the surface of the electrode was compact and the edge was not warped,which could ensure the reliability of the electrode.
作者
万剑
王宏
刘同心
陈鹏
WAN Jian;WANG Hong;LIU Tongxin;CHEN Peng(Nanjing Institute of Materials Science for Electric Light Sources,Nanjing 210015;School of Materials Science and Engineering,Nanjing University of Technology,Nanjing 211816)
出处
《材料导报》
EI
CAS
CSCD
北大核心
2019年第S02期512-515,共4页
Materials Reports
关键词
光敏导电银浆
共聚物
分子量
酸值
显影性能
photosensitive conductive silver paste
copolymer
molecular weight
acid value
developing properties
