摘要
Reactions of atoms and molecules on chamber walls in contact with low temperature plasmas are important in various technological applications.Plasma-surface interactions are complex and relatively poorly understood.Experiments performed over the last decade by several groups prove that interactions of reactive species with relevant plasma-facing materials are characterized by distributions of adsorption energy and reactivity.In this paper,we develop a kinetic Monte Carlo(KMC)model that can effectively handle chemical kinetics on such heterogenous surfaces.Using this model,we analyse published adsorption-desorption kinetics of chlorine molecules and recombination of oxygen atoms on rotating substrates as a test case for the KMC model.
