摘要
目的揭示电芬顿参数对生成羟基自由基(·OH)最大浓度和·OH总量的影响规律,实现电芬顿反应对单晶6H-SiC氧化腐蚀的最大化。方法通过6因素5水平正交试验,分析电压大小、电极种类、氧化剂过氧化氢(H2O2)浓度、催化剂种类、催化剂浓度以及反应液pH等参数对电芬顿反应生成·OH最大浓度和·OH总量的影响规律,找出最佳试验组合和主要影响因素,并利用最佳试验组合与同等条件下的芬顿反应对单晶6H-SiC进行氧化腐蚀对比分析。结果影响电芬顿反应生成·OH最大浓度和·OH总量的主次顺序为:催化剂种类>电压大小>H2O2浓度>催化剂浓度>pH>电极种类。其中,催化剂种类、电压、氧化剂浓度影响显著,影响因子分别为45%、22%、12%和30%、19%、41%。与同等条件下的芬顿反应相比,电芬顿反应生成的·OH最大浓度、·OH总量分别提高了61.34%和68.62%,在6H-SiC表面能形成更多SiO2氧化层。结论电芬顿反应通过控制电参数,能够加速Fe^3+向Fe^2+转化并原位生成部分H2O2,补充反应过程中H2O2的消耗,提高·OH生成总量,加速·OH对单晶SiC基片的氧化腐蚀作用。
The work aims to reveal the effects of the maximum concentration of hydroxyl radicals(·OH)and the total concentration of ·OH generated by the Electro-Fenton parameters, so as to maximize the Electro-Fenton reaction on singlecrystal 6H-SiC oxidation corrosion. The influence rules of the voltage, electrode types, oxidant concentration of hydrogenperoxide (H2O2), catalyst types, catalyst concentration, and reaction solution pH and other parameters were optimized throughthe six-factor five-level orthogonal experiment to generate maximum concentration of ·OH and total concentration of ·OH andfind the best experimental combination and main influencing factors were found. Then, the optimal experimental combinationand Fenton reaction under the same conditions were used to compare and analyze on the single crystal 6H-SiC oxidationcorrosion. The order of factors influencing the maximum concentration of ·OH and the total concentration of ·OH generated bythe Electro-Fenton reaction was catalyst type > voltage > H2O2 concentration > catalyst concentration > pH> electrode type;ofwhich, catalyst type, voltage, and oxidant concentration had significant effects, with impact factors of 45%, 22%, 12% and 30%,19%, 41%, respectively. Compared with the Fenton reaction under the same conditions, the maximum concentration of ·OH andthe total concentration of ·OH produced by the Electro-Fenton reaction increased by 61.34% and 68.62%, respectively, and moreSiO2 oxide layers could be formed on the 6H-SiC surface. The Electro-Fenton reaction can accelerate the conversion of Fe3+ toFe2+ and generate a portion of H2O2 in situ by controlling the electrical parameters, supplement the consumption of H2O2 duringthe reaction, increase the total concentration of ·OH produced, and accelerate the oxidative and corrosive effect of ·OH on thesingle crystal SiC substrate.
作者
邓家云
潘继生
阎秋生
DENG Jia-yun;PAN Ji-sheng;YAN Qiu-sheng(School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)
出处
《表面技术》
EI
CAS
CSCD
北大核心
2020年第4期64-73,共10页
Surface Technology
基金
NSFC-广东联合基金(U1801259)
广州市科技计划项目资助(201904010300)
广东省自然科学基金(No.2019A1515011243)。
关键词
电芬顿
6H-SIC
化学机械抛光
正交试验
羟基自由基
氧化反应
Electro-Fenton
6H-SiC
chemical mechanical polishing
orthogonal experimental
hydroxyl radical
oxidation reaction
