摘要
飞秒激光凭借其超短脉宽和极高峰值功率,在微纳加工中发挥了重要的优势,而飞秒激光的加工效率制约其在工业领域的应用。近年来,研究者成功将空间光调制器应用于飞秒激光加工,实现飞秒激光加工效率和灵活性的进一步提高。本文综述了近年来硅基液晶空间光调制器在飞秒激光加工领域的研究进展,主要包括多焦点并行加工、结构光场并行加工和矢量光场加工,分析了三种方法的优势和不足。并从光场均匀性和衍射效率两个方面,讨论了近年来对光场质量的研究。最后探讨了该领域目前存在的问题,并对未来提出了展望。
With ultra short pulse width and high peak power,femtosecond laser plays an important role in micro/nano machining.However,the processing efficiency of femtosecond laser restricts its application in industry.In recent years,researchers have successfully applied spatial light modulator to femtosecond laser processing to further improve the efficiency and flexibility of femtosecond laser processing.In this paper,the progress of recent research of Si-based liquid crystal spatial light modulator in femtosecond laser processing is reviewed.It concludes three processing methods that is multi foci parallel processing,structured light field parallel processing,and vector light field processing.The advantages and disadvantages of these processing methods are analyzed.The recent study of the field quality is discussed in the aspects of the uniformity and diffraction efficiency of the field.Finally,the problems in this field are discussed,and the prospect for the future is put forward.
作者
孔德键
孙小燕
董卓林
胡友旺
段吉安
Kong Dejian;Sun Xiaoyan;Dong Zhuolin;Hu Youwang;Duan Ji'an(State Key Laboratory of High Performance Complexe Mannfacturing,College of Mecharical and Electrical Engineering,Central South University,Changsha,Hunan 410083,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2020年第11期187-206,共20页
Laser & Optoelectronics Progress
基金
国家自然科学基金面上项目(51875584,51875585)
国家重点研发计划项目(2018YFB1107803,2017YFB1104800)。
关键词
激光光学
飞秒激光
硅基液晶空间光调制器
多焦点并行加工
结构光场
矢量光场
光场质量
laser optics
femtosecond laser
Si-based liquid crystal spatial light modulator
multi foci parallel processing
structured light field
vector light field
field quality
