摘要
设计了一台微电子机械系统(MEMS)电子听诊器,并应用于冠心病心音的检测中。首先,介绍了MEMS电子听诊器核心敏感单元微结构设计原理,并得出了ANSYS仿真环境中的应力和谐振频率均适用于检测心音信号的微结构尺寸;之后,对微结构进行加工制备和流固耦合封装,配合信号检测电路得到一台完整的MEMS电子听诊器用于检测冠心病心音信号。检测结果表明:所测冠心病心音时域波形的信噪比相比3M电子听诊器高8.2 dB。利用经验小波变换算法分解冠心病舒张期心音后得到三个模态频谱及对应频谱能量,经过数据统计对比发现,MEMS电子听诊器所测的冠心病不同舒张期心音的模态频谱能量较3M电子听诊器的具有更好的一致性和稳定性。
A micro-electromechanical system(MEMS)electronic stethoscope was designed and applied in the heart sound detection of the coronary heart disease(CHD).Firstly,the microstructure design principle of the core sensitive unit of the MEMS electronic stethoscope was introduced.And it is obtained that the stress and resonance frequency are appropriate for the size of the micro-structure to detect the heart sound signal in ANSYS simulation environment.Afterwards,the microstructure was fabricated and its fluid-solid coupling package was completed.And combined with the signal detection circuit,a complete MEMS electronic stethoscope was obtained to detect the heart sound signal of the CHD.The test results show that the signal-to-noise ratio of the heart sound time domain waveform of the CHD with the MEMS electronic stethoscope is8.2 dB higher than that with the 3 M electronic stethoscope.The empirical wavelet transform algorithm was used to decompose the diastolic heart sounds of the CHD to obtain three modal spectra and corresponding spectral energies.Through the data statistical comparison,it is found that the modal spectral energies of different diastolic heart sounds of the CHD measured by the MEMS electronic stethoscope has better consistency and stability than those of 3 M electronic stethoscope.
作者
李海霞
张国军
任勇峰
Li Haixia;Zhang Guojun;Ren Yongfeng(State Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China;Department of Electronics,Xinzhou Teachers University,Xinzhou 034000,China)
出处
《微纳电子技术》
北大核心
2020年第8期657-664,共8页
Micronanoelectronic Technology
基金
山西省1331工程重点实验室建设项目(2016M600243)
山西省高校教学改革项目(J2019174)。
