摘要
全息防伪技术已经实现了工业上的应用,但仍存在精度差、成本高等问题。通过计算出二值图的傅里叶变换频谱,采用罗曼三型编码,计算出二元全息图。通过电子束蒸发镀膜、等离子增强化学气相沉积、电子束曝光、感应耦合等离子干法刻蚀、纳米压印等半导体工艺,制备出了高精度、低成本、可复制的全息图。并对所制备的全息图分别用红色、绿色激光进行了测试,得到的衍射图案清晰,复现方式简单。
Holographic anti-counterfeiting technology has been applied in industry,but there are still some problems such as poor precision and high cost.The binary hologram is calculated by calculating the Fourier transform spectrum of the binary image and using LohmannⅢcoding.High quality,low cost and reproducible hologram were fabricated by Electron Beam Evaporation,PECVD,Electron Beam Lithography,ICP dry etching,and Nano Imprinting semiconductor processes.The hologram were tested by using red and green laser respectively,and the diffraction patterns are clear and the way of reproduction is simple.
作者
李攀
张金润
卢宏
LI Pan;ZHANG Jinrun;LU Hong(Wuhan National Laboratory of Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China)
出处
《光学技术》
CAS
CSCD
北大核心
2020年第5期587-590,共4页
Optical Technique
关键词
信息光学
计算机全息图
罗曼Ⅲ编码
information optics
computer-generated hologram
LohmannⅢcoding