摘要
利用等离子体增强化学气相沉积技术,在AH32钢表面制备不同硅含量的渗硅类金刚石(Si-DLC)薄膜,以改善AH32钢的疏水性和耐蚀性。利用扫描电镜和原子力显微镜,对不同硅含量下制备的Si-DLC薄膜的表面形貌进行表征;利用表面粗糙度仪,对薄膜和基体表面粗糙度进行表征;利用微量进样器,对薄膜和基体与水的静态接触角和表面自由能进行测量。利用拉曼光谱,对薄膜和基体成分和结构进行表征;同时利用电化学工作站,对薄膜开路电位、阻抗和极化曲线进行了检测,并探讨了硅含量对DLC薄膜疏水和耐腐蚀性能的影响规律和作用机制。研究发现:硅含量的增加,导致薄膜表面粗糙度减小,疏水角增大,硅原子数分数为13.5%的Si-DLC薄膜疏水性能最好。随着硅含量的增加,Si-DLC薄膜的耐腐蚀性能提高,其中硅原子数分数为13.35%的耐腐蚀能力最佳。
The plasma-enhanced chemical vapor deposition was used to prepare the diamond-like carbon(Si-DLC)films with different silicon contents on the surface of an AH32 steel to improve the hydrophobicity and corrosion resistance of the AH32 steel.The surface morphologies of the Si-DLC films were characterized by SEM and AFM.The surface roughness of the films and the matrix were characterized by surface analyzer.The water static contact angle and surface free energy of the films and the matrix were measured by microliter syringe.The compositions and microstructures of the films and the matrix were characterized by Raman spectroscopy.Meanwhile,the open circuit potential,impedance,and polarization curves of the films were detected by electrochemical workstation.The influence mechanism and influence law of the silicon contents on hydrophobicity and corrosion resistance were also discussed.The results show that with the increase of the silicon content,the surface roughness decreases and the water contact angle increases.The optimum hydrophobicity of the Si-DLC film was obtained at the silicon content of 13.5%.With the increase of the silicon content,the corrosion resistance of the Si-DLC films increases.The optimum corrosion resistance of the Si-DLC film was obtained at the silicon content of 13.5%.
作者
魏于丁
张腾
张贵娟
康红伟
张豫坤
陈东旭
王亚男
周艳文
WEI Yuding;ZHANG Teng;ZHANG Guijuan;KANG Hongwei;ZHANG Yukun;CHENG Dongxu;WANG Yanan;ZHOU Yanwen(School of Materials and Metallurgy,University of Science and Technology Liaoning Anshan 114051,China)
出处
《辽宁科技大学学报》
CAS
2020年第5期338-343,共6页
Journal of University of Science and Technology Liaoning
基金
辽宁省自然科学基金(20180510001)
辽宁科技大学校人才计划(2018RC03)
辽宁省教育厅项目(SKLMEA-USTLN(201909))
辽宁科技大学大学生创新创业训练计划(201910146154)。
关键词
AH32钢
类金刚石薄膜
化学气相沉积
接触角
电化学
AH32 steel
diamond-like carbon film
chemical vapor deposition
contact angle
electrochemistry
