摘要
半导体制造装备中高精度运动控制技术的不断发展,对高性能永磁电机纹波转矩的抑制提出了更高要求。电机的纹波转矩严重影响了主轴系统的工作性能。设计了一种新型无纹波转矩的高精密环形电机,其磁轭可以提供理想的正弦磁通量分布,从而产生平稳的转矩。实验结果表明,该环形电机具有高精度、低温升等优异性能。
Development of the high-precision motion control technology in semiconductor manufacturing equipment had put forward higher requirements for the suppression of ripple torque of high-performance permanent magnet motors.The motor ripple torque affected the performance of the spindle system seriously.A new type of high-precision toroidal type motor without ripple torque was designed,and its yoke provided ideal sinusoidal magnetic flux distribution,which generated stable torque.Experimental results show that the designed toroidal type motor has excellent service performance such as high precision and low temperature rise.
作者
刘宗虎
杨帆
LIU Zong-hu;YANG Fan(Xi'an Aerospace Propulsion Testing Technique Institute,Xi'an,710100,China)
出处
《微特电机》
2020年第12期23-26,共4页
Small & Special Electrical Machines
关键词
高精密电机
纹波转矩
齿槽转矩
磁通密度
环形
high-precision motor
ripple torque
cogging torque
magnetic flux density
toroidal type
