摘要
精密加工制造中颗粒物含量影响产品质量和成品率,是评价高纯系统的重要指标之一。高纯管路系统的颗粒物来自于高纯材料的制造、管道材料表面的杂质、产品气体自身携带的污染物、控制阀门和过滤器、施工安装产生的污染。通过分析颗粒物来源,从材料的纯化、表面处理、阀门和过滤器选型、焊接质量控制、管道安装、预制加工作业环境的洁净度控制几方面提出颗粒物防治措施建议。
Particle content is one of the important indicators of high purity system,which has a great influence on the product quality and product rate.The particles of high purity pipeline system come from the manufacture of high purity materials,impurities on the surface of pipeline materials,pollutants carried by product gas itself,control valves and filters,and pollution caused by construction and installation.By analyzing the source of particles in high purity system,some suggestions on the prevention were put forward from the aspects of materials purification,surface treatment,valves and filters selection,welding quality control,pipe installation and cleanness control of prefabrication working environment.
作者
刘见华
万烨
赵雄
赵宇
王磊
严大洲
LIU Jian-hua;WAN Ye;ZHAO Xiong;ZHAO Yu;WANG Lei;YAN Da-zhou
出处
《有色冶金节能》
2020年第6期25-29,共5页
Energy Saving of Nonferrous Metallurgy
关键词
高纯气体
颗粒物
管路系统
洁净度
high purity gas
particles
pipeline system
purity
