摘要
静电电机不使用磁铁、无需线圈、结构简单、效率高,在微机电系统中有着潜在的应用前景,但目前基于电容可变原理的直线型静电电机还缺乏理论模型。该文以一种双激励直线型静电电机为例,通过求解多层介质情况下的泊松方程和拉普拉斯方程,获得电机内部电场分布情况;继而通过静电能量的虚位移法获得电机推力特性,由此建立起完整的电机数学模型,并计算得到电机动子的推力曲线和最大电场强度数值,该推力曲线可用于指导电机换相系统设计;随后建立电机的二维有限元模型,仿真结果验证了所提数学模型的正确性;最后根据电机各个参数与最大推力的关系并结合Sobol灵敏度分析结论对电机进行优化设计。结果表明,输入电压,介电常数和定、动子导体间距离对电机推力的影响最大,电极宽度对推力的影响最小。据此可指导该类电机的设计。
Electrostatic motor has the merits of no magnets,no coils,simple structure and high efficiency,which has potential application prospects in microelectromechanical systems(MEMS).However,there is no theoretical model for the linear electrostatic motor based on variable capacitance.Taking a double-excited linear electrostatic motor as an example,the distribution of electric field inside the motor was obtained by solving the Poisson equation and Laplace equation in the case of multi-layer media.Then,the thrust characteristics of the motor were obtained through the virtual displacement method,thereby establishing a complete mathematical model of the motor and calculating the thrust curve and the maximum field strength of the electric motor.The thrust curve can be used to guide the design of the motor commutation system.Then,a two-dimensional finite element model of the motor was established,and the simulation results have verified the correctness of the mathematical model.Finally,according to the relationship between each parameter of the motor and the maximum thrust,combined with the Sobol sensitivity analysis,the motor was optimized.The results show that the input voltage,the permittivity and the distance between the stator and the slider have the greatest influence on the motor thrust,while the electrode width has the least influence.Accordingly,the design of such motors can be guided.
作者
李华峰
王伊凡
Li Huafeng;Wang Yifan(State Key Laboratory of Mechanics and Control of Mechanical Structures Nanjing University of Aeronautics and Astronautics,Nanjing 210016 China)
出处
《电工技术学报》
EI
CSCD
北大核心
2021年第6期1201-1209,共9页
Transactions of China Electrotechnical Society
基金
国家重点基础研究发展计划资助项目(2015CB057503)。
关键词
直线型静电电机
数学模型
多介质电场分析
灵敏度分析
Linear electrostatic motor
mathematical model
analysis of multi-medium electric field
sensitivity analysis
