摘要
为了提高光纤压力传感器的灵敏度,提出了一种具有倒凹槽结构的柔性光纤压力传感器的设计方案。用聚二甲硅氧烷(PDMS)作为该传感器柔性基底,通过PDMS受力形变,带动光纤发生形变,从而实现光纤的轴向拉伸。利用光频域反射计(OFDR)测量光纤的轴向应变变化。对所提出的增敏结构传感器和改进前的传感器进行Abaqus有限元仿真分析和实验验证。结果表明,该增敏结构可以有效的提高传感器的灵敏度。在0~100 kPa的测压范围内,该传感器具有很好的重复性及线性度,灵敏度从未改进前的1.09/kPa提高到1.69/kPa。
To improve the sensitivity of optical fiber pressure sensor,a flexible optical fiber pressure sensor with inverted groove structure was proposed.Polydimethylsiloxane(PDMS)was used as the flexible substrate of the sensor.The optical fiber was stretched axially with the stress deformation of PDMS.Optical frequency domain reflectometer(OFDR)was used to measure the axial strain variation of optical fiber.The sensor before and after the improvement was analyzed by Abaqus simulation and actual measurement.The results show that the sensitivity of the sensor can be improved well.In the range of 0~100kPa,the sensor has good repeatability and linearity.Compared with the sensor before improvement,the sensitivity increased from 1.09/kPa to 1.69/kPa.
作者
隋丹丹
张会新
张利平
洪应平
芦夜召
崔凯
SUI Dan-dan;ZHANG Hui-xin;ZHANG Li-ping;HONG Ying-ping;LU Ye-zhao;CUI Kai(North University of China,National Key Laboratory of Electronic Measurement Technology,Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education Taiyuan 030051,China;Beijing Research Institute of Telemetry,Beijing 100076,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2021年第3期19-22,53,共5页
Instrument Technique and Sensor
基金
国家自然科学基金杰出青年基金(61525107)。
关键词
光纤压力传感器
聚二甲基硅氧烷
灵敏度
Abaqus仿真
光频域反射计
optical fiber pressure sensor
polydimethylsiloxane(PDMS)
sensitivity
Abaqus simulation
optical frequency domain reflectometer(OFDR)
