摘要
在利用等离子体增强脉冲激光沉积系统沉积立方氮化硼 (cBN)薄膜时 ,发现了氮化硼 (BN)材料的E BN相 ,并利用扫描电镜和红外吸收光谱及X射线衍射技术对薄膜样品进行了分析 ,得到了制备较高质量E BN薄膜的一些热力学参数及时间参数 ,验证了现有的E BN结构的形成理论。
In this study,explosion boron nitride (E-BN) was found in the process of depositing cubic boron nitride (cBN) thin film by Plasma Enhanced Pulsed Laser Deposition (PEPLD) method at room temperature.The E-BN thin film was identified using SEM,FTIR and X-ray diffraction techniques.The thermodynamic parameters and time parameter for preparing high-quality E-BN thin film were obtained. This has supported the existing formation theory of the structure of E-BN.
出处
《高压物理学报》
CAS
CSCD
北大核心
2002年第4期297-300,共4页
Chinese Journal of High Pressure Physics
基金
湖南省教育厅资助 (0 1C0 6 1)
