摘要
静电放电(Electrostatic Discharge,ESD)作为一种常见的近场危害源,在其放电过程中可形成高电压和瞬时大电流,使得器件的安全性能大大下降,并影响半导体器件的电学特性。本文对火工品静电感度试验装置非接触放电时的等效电路模型进行分析,并根据等效电路进行仿真,研制试验装置,针对电容与电阻的不同组合进行放电试验,验证仿真结果以及电阻电容对静电放电的影响。
Electrostatic discharge is a common near-field hazard source,during which high voltage and instantaneous large current can be formed.Electrostatic discharge reduces the safety performance of the device and affects the electrical characteristics of semiconductor devices.This paper analyzes the equivalent circuit model in the electrostatic sensitivity test device for initiating explosive device during non-contact discharge and simulates circuit according to the equivalent circuit.A test device was developed to conduct discharge tests for different combinations of capacitor and resistor,and to verify the simulation results and the influence of resistor and capacitor on ESD.
作者
赵丹
吴桂林
朱继芳
黄昀
ZHAO Dan;WU Gui-lin;ZHU Ji-fang;HUANG Yun(Sichuan Aerospace Measurement Testing Research Institute,Chengdu 610100,China;Sichuan Academy of Aerospace Technology,Chengdu 610100,China)
出处
《宇航计测技术》
CSCD
2021年第3期73-78,共6页
Journal of Astronautic Metrology and Measurement
关键词
静电放电
静电感度
非接触式
Electrostatic Discharge(ESD)
Electrostatic sensitivity
Non-contact
