摘要
为了拓展精共相阶段平移误差的检测范围、缩减检测流程以及减少多方法检测在衔接过程中的装校要求,本文提出基于多波长干涉技术的拼接镜共相检测方法。在粗共相阶段,采用单色激光干涉以及白光干涉分别实现百微米以及微米量级的平移误差标定;在精共相阶段,采用双波长激光干涉实现微米级平移误差的高精度检测。以整镜中剖出的两块六边形球面子镜为测试对象,采用红绿激光双波长移相干涉仪与白光显微干涉仪对所提的技术方案进行实验验证,提出基于拼接镜面形检测数据的相对平移误差解算算法,设计并构建一套拼接镜共相装校系统。粗共相阶段标定平移误差至微米量级后,在精共相阶段子镜间平移误差可由601.6nm补偿至16.0nm。
In order to expand the detection range of the piston error in the fine common phase stage,reduce the detection process and reduce the installation and calibration requirements in the multi-method detection connection process,this paper proposes a segmented mirror common phase detection method based on multi-wavelength interference technology.In the coarse common phase,monochromatic laser interferometry and white light interferometry are used to achieve the calibration requirements of 100 micron-level and micron-level piston errors respectively;in the fine common phase,dual-wavelength laser interferometry is used to achieve high-precision detection of micron-level piston error.Taking the two hexagonal spherical sub-mirrors cut out of the whole mirror as the test object,the red and green laser dual-wavelength phase shifting interferometer and the white light micro-interferometer are used to experimentally verify the proposed technical scheme,and the proposed technique is based on the segmented mirror shape.A relative piston error calculation algorithm based on the segmented mirror shape detection data is proposed,and a set of segmented mirror co-phasing assembly and calibration system is designed and constructed.After the calibrated piston error of the coarse common phase is on the order of micrometers,the piston error between the sub-mirrors in the fine common phase can be compensated from 601.6 nm to 16.0 nm.
作者
季文
袁群
高志山
第五蔻蔻
刘威剑
王若言
郭珍艳
Ji Wen;Yuan Qun;Gao Zhishan;Diwu Koukou;Liu Weijian;Wang Ruoyan;Guo zhenyan(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing,Jiangsu 210094,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2021年第16期120-129,共10页
Acta Optica Sinica
基金
国家重点研发计划(2019YFB2005500)
国家自然科学基金(U1931120)
江苏省六大人才高峰项目(RJFW-019)。
关键词
测量
拼接镜
共相检测
双波长干涉
白光显微干涉
measurement segmented mirror
co-phasingd
etection dual-wavelength interferometry
white light micro-interferometry
