摘要
柔性传感器是纺织品实现智能化的核心部件,在可穿戴智能设备中发挥着重要的作用。电容式压力传感器具有较高的灵敏度,是柔性压力传感器领域的热点之一。通过分析电容式压力传感器的结构组成,明确了影响电容式压力传感器灵敏度的各种因素。在电容式压力传感器的结构层面上,综述了三类常见的微结构在提升传感器灵敏度方面的应用及各自的优缺点。多孔海绵结构虽然制作过程简单,但是对传感器灵敏度的提升作用并不明显;阵列式结构虽然提升作用明显,但是制作过程复杂;微槽花纹结构制作简单、成本较低、提升作用适中。最后,对高灵敏度电容式压力传感器的应用和发展进行了总结与展望。
Flexible sensor is a core component to achieve intelligent textiles and plays an important role in wearable intelligent devices. Capacitive pressure sensor has higher sensitivity and is one of the hot spots in the field of flexible pressure sensors. By an analysis of the structures of the capacitive pressure sensors, the various factors affecting the sensitivity are identified. Based on the structures of the capacitive pressure sensors, applications for increasing the sensitivity, and advantages and disadvantages of three kinds of common microstructures are summarized. The porous sponge structure is simple to process, but has no obvious effect on improving the sensor sensitivity;the array structure has obvious lifting effect, but the process is complex;the micro-groove pattern structure is of simple process and low cost, and has a mo-derate lifting effect. Finally, the application and development of high sensitivity capacitive pressure sensors are summarized and prospected.
作者
周帅
刘茜
Zhou Shuai;Liu Qian(School of Textiles and Fashion,Shanghai University of Engineering Science Shanghai 201620,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第12期1047-1053,共7页
Micronanoelectronic Technology
