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基于MEMS微镜的调频连续波激光雷达设计 被引量:1

Design of frequency modulated continuous wave LIDAR based on MEMS mirror
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摘要 将调频连续波(FMCW)激光测距技术与MEMS微镜扫描成像技术相结合,设计了一种新型激光雷达系统。引入平衡相干探测技术和基于辅助干涉光路的调频信号非线性校正技术,搭建了双光路测距仿真系统。在400 m以内最大测距误差不超过1.26 m,相对测量精度小于0.32%,100 m测距误差仅为0.270 8 m。为了满足FMCW激光雷达的大角度探测需求,利用望远结构设计了一种基于MEMS微镜的大角度光学扫描系统。此系统可以在激光调制波长为1 520 nm至1 570 nm的范围内将发射光学系统的扫描角从±10°扩展到±28.5°,光束发散角小于0.5 mrad,在100 m的目标距离处,光斑半径仅为7 cm。 A new type of laser radar system is designed by combining frequency modulated continuous wave(FMCW) laser ranging technology and MEMS mirror scanning technology. The balanced coherent detection technology and the frequency modulation signal nonlinear correction technology based on auxiliary interference light path are introduced to build the simulation system of double optical path ranging. Within 400 m, the maximum ranging error does not exceed 1.26 m, the relative measurement accuracy is less than 0.32%, and the 100 m ranging error is only 0.2708 m. In order to meet the detection requirement of wide field of view, a large-angle optical scanning system based on MEMS mirror is designed by using the telephoto structure. This system can extend the scanning angle from ±10° to ±28.5° within the wavelength range from 1 520 nm to 1 570 nm, and the beam divergence angle is less than 0.5 mrad, meanwhile, the spot radius is only 7 cm at the target range of 100 m.
作者 庞亚军 姚美菱 孙有春 白振旭 PANG Yajun;YAO Meiling;SUN Youchun;BAI Zhenxu(Center for Advanced Laser Technology,Hebei University of Technology,Tianjin 300401,China;Hebei Key Laboratory of Advanced Laser Technology and Equipment,Tianjin 300401,China;Shijiazhuang Posts and Telecommunications Technical College,Shijiazhuang 050021,China)
出处 《激光杂志》 CAS 北大核心 2022年第4期46-51,共6页 Laser Journal
基金 国家自然科学基金(No.61905063、61905061) 河北省自然科学基金(No.F2020202055、F2019202337)。
关键词 激光雷达 调频连续波 MEMS 光学设计 大视场 LIDAR frequency modulated continuous wave MEMS optical design large field of view
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