摘要
上海光源建立的同步辐射硬X射线纳米探针线站配置了一台多层膜单色器以满足纳米尺度的研究需求。为了了解高热负载作用下多层膜单色器中膜的温度情况,需要对其进行有限元热分析。由于使用目前的方法存在诸多不便,提出一种基于ANSYS Workbench的多层膜热分析方法。首先在Workbench DM中建立多层膜模型,使用多套Shell132单元模拟多层膜结构;其次给每层子膜赋予厚度和材料属性,通过单元类型控制,面控制和尺寸控制密化热载区域并使多层膜和基底之间网格节点对应;最后引入表面效应单元SURF152施加非均匀热流密度,再用约束方程连接表面效应单元,多层膜和基底上表面的温度通过求解,就能得到任一膜层的温度分布数据。还进行了方法验证,证明其可靠性,然后使用该方法完成了纳米探针线站非均匀热载作用下200个周期Ru/C多层膜的热分析。结果表明这种基于ANSYS Workbench的纳米探针多层膜热分析方法具有操作简便、交互性好、处理效率高的优点。
A hard X-ray nanoprobe beamline is building to study nano-scale material structure and properties at Shanghai Synchrotron Radiation Facility.In order to obtain the temperature of multilayer monochromator under high thermal load,finite element thermal analysis is needed.In view of the inconveniences of the current method,this paper aims to propose a thermal analysis method for multilayers based on ANSYS Workbench.The nanoprobe multilayers model is intuitively established in Design Modeler.Multiple sets of Shell132 elements are used to simulate multilayered structure,and cycle numbers,thickness,material and element properties of sub-layers in each set are assigned.Multiple methods including grid cell type control,surface control and size control are used to mesh,and the grid nodes between the substrate and multilayer films are corresponded with each other while the thermal load area grid is refined.The surface effect element SURF152 is introduced to apply the heat flux,and the constraint equation is used to connect the surface effect elements,the temperature of multilayer films and the upper surface of the substrate.Finally,the temperature distribution data of any layer can be obtained by solving.Next,the method is verified to prove its reliability,and then the thermal analysis of 200 periods of Ru/C multilayers under non-uniform thermal loading in the nanoprobe beamline is completed in this method.The results show that this method based on ANSYS Workbench has the advantages of simple operation,good interaction and high processing efficiency.
出处
《工业控制计算机》
2022年第5期60-63,共4页
Industrial Control Computer
基金
国家自然科学基金支持(Nos.U1832172,61975111)。
关键词
多层膜
有限元热分析
纳米探针线站
表面效应单元
壳单元
multilayer film
finite element thermal analysis
nanoprobe beamline
surface effect element
shell element
