摘要
本文介绍了交叉电容原理的起源和发展历程。讲述交叉电容用于电容基准的研究现状以及对1 pF电容量的测量不确定度逐步降低到10^(-8)。综述了交叉电容器用于传感器制作的方法和原理以及典型应用,对比传统电容传感器对交叉电容式传感器进行了如下分类:变介质型、变面积型和变极板间距型,并对它的优缺点进行了分析;最后讲述了微小电容检测的方法。在分析现有交叉电容传感器的研究基础上,探讨了如何进一步优化交叉电容式传感器以及发展方向。通过对现有的交叉电容式传感器进行综述归纳,使得电容传感器体系更加完善同时为后续的交叉电容器研究提供参考。
This paper introduces the origins and derivation of cross capacitance principle.Its development for capacitor benchmarks and the gradual reduction in biasness while measuring 1 pF capacitance to 10^(-8) was discussed.Furthermore,the methods,principle and application of cross capacitor in sensor manufacturing and in micro capacitance detection methods was reviewed.Compared with the traditional capacitance sensor,the cross-capacitance sensor is classified as follows:Variable medium type,variable area type and variable plate spacing type,and its advantages and disadvantages are analyzed.Based on the analysis of the existing cross-capacitance sensor research,how to further optimize the cross-capacitance sensor and its development direction are discussed.By summarizing and summarizing the existing cross-capacitive sensors,the capacitive sensor system is more perfect and a reference is provided for the follow-up cross-capacitor research.
作者
张洪朋
郑文博
李伟
王英新
赵旭鹏
孙玉清
Zhang Hongpeng;Zheng Wenbo;Li Wei;Wang Yingxin;Zhao Xupeng;Sun Yuqing(School of Marine Engineering,Dalian Maritime University,Dalian 116026,China)
出处
《电子测量技术》
北大核心
2022年第7期117-124,共8页
Electronic Measurement Technology
基金
国家自然科学基金(51679022)
大连市科技创新基金(2019J12GX023)项目资助。
关键词
交叉电容
电容基准
传感器
电容检测
cross capacitance
capacitor benchmarks
sensor
capacitance detection
