摘要
阐述针对微电子专业学生对薄膜课程理论和实践的学习要求,定制集电阻蒸发、电子束蒸发、磁控溅射三种镀膜方法于一体的镀膜设备。通过创新的教学实践,使学生获得真空设备、薄膜设备的安装、调试、故障分析与排除的基本技能,掌握薄膜制备的工艺设计及真空镀膜设备的使用。
This paper expounds elaborates on the learning requirements of microelectronics students for the theory and practice of thin film courses,and customizes a coating equipment that integrates three coating methods:resistance evaporation,electron beam evaporation,and magnetron sputtering.Through innovative teaching practices,students will acquire basic skills in the installation,debugging,fault analysis,and troubleshooting of vacuum equipment and thin film equipment,and master the process design of thin film preparation and the use of vacuum coating equipment.
作者
杨艳
罗乐
巫丛平
柏淑红
YANG Yan;LUO Le;WU Congping;BAI Shuhong(School of Electronic Engineering,Chengdu Technological University,Sichuan 610073,China)
出处
《集成电路应用》
2024年第5期78-80,共3页
Application of IC
基金
四川省高等教育人才培养质量和教学改革项目(JG2021-1396)
成都工业学院人才培养质量和教育教学改革项目(20210204)。
关键词
薄膜工艺
实践教学
工程应用
课程体系
thin film process
practical teaching
engineering applications
curriculum system
