摘要
光纤声传感器被广泛应用在工业、医疗等领域。为了提高光纤F-P声传感器的性能,本文提出了一种L型轮辐结构的F-P传感膜片。膜片的厚度为15μm、梁宽度为0.5 mm、中心膜片的半径为1 mm。膜片由激光加工技术在304不锈钢上刻蚀而成。实验对1000 Hz下的传感器灵敏度进行研究,将传感器应用于光声池共振频率为1600 Hz的光声光谱气体检测系统中,并实现对50~100×10^(-6)的乙炔(C_(2)H_(2))气体浓度测量。实验结果表明,该传感器在1000 Hz下的声压灵敏度为25.4 nm/Pa,传感器可实现的最小可探测声压(MDP)为38.2μPa/Hz^(1/2)@1 kHz,声压信噪比为76.8 dB。实验所得到的光声光谱二次谐波信号的峰值与乙炔浓度呈现良好的线性关系,乙炔浓度的响应度为1.8 pm/10^(-6)。该传感器在光声光谱等单频声信号检测领域具有广泛的应用前景。
Fiber optic acoustic sensors are widely used in industry,medical and other fields.In order to improve the performance of fiber-optic Fabry-Perot acoustic sensors,a L-shaped spoke structure Fabry-Perot sensing diaphragm is proposed in this work.The thickness of the diaphragm is 15μm,the width of the beam is 0.5 mm,and the radius of the center diaphragm is 1 mm.The diaphragm is etched on 304 stainless steel by laser processing technology.In the experiment,the sensitivity of the sensor at 1000 Hz was investigated,and the sensor was applied to a photoacoustic spectroscopic gas detection system with a photoacoustic cell resonance frequency of 1600 Hz,and measurement of acetylene(C_(2)H_(2))gas concentration from 50~100×10^(-6) was achieved.The experimental results indicate that the sound pressure sensitivity of the sensor is 25.4 nm/Pa at 1000 Hz,the minimum detectable sound pressure(MDP)achievable by the sensor is 38.2μPa/Hz^(1/2)@1 kHz,and the acoustic pressure signal-to-noise ratio is 76.8 dB.The peak of the second harmonic signal of the photoacoustic spectroscopy obtained from the experiment shows a good linear relationship with the acetylene concentration,and the response of the acetylene concentration is 1.8 pm/10^(-6).The sensor has a wide range of applications in the field of single-frequency acoustic signal detection,such as photoacoustic spectroscopy.
作者
王巧云
闻妲
王纪龙
严重越
朱子恒
Wang Qiaoyun;Wen Da;Wang Jilong;Yan Chongyue;Zhu Ziheng(Northeastern University at Qinhuangdao,Qinhuangdao 066004,China;Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology,Qinhuangdao 066004,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2024年第5期110-117,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(11404054)
河北省自然科学基金(F2019501025,F2020501040)
中央高校基本科研业务费专项资金(2023GFZD002)项目资助。
关键词
光纤声传感器
F-P干涉
L型轮辐结构
光声光谱
fiber-optic acoustic sensor
F-P interference
L-shaped spoke structure
photoacoustic spectroscopy
