摘要
The guidance catalog for major technical equipment issued by the Ministry of Industry and Information Technology on September 9 has attracted widespread attention.Among the listed items is a deep ultraviolet(DUV)lithography machine,which operates at a wavelength of 193 nanometers(nm),with a resolution below 65 nm and an overlay accuracy under 8 nm.Its inclusion in the catalog,which aims to promote the use of listed equipment,signifies that China has made breakthroughs in high-end chip manufacturing.
