摘要
为精确非接触地监测磁悬浮球体的位移,本文设计了两种电容位移检测方案:单端方案和差分方案。运用COMSOL Multiphysics软件,为这两种方案构建了有限元仿真模型,并分析了测试电容值与磁悬浮球位移之间的关系。在单端式方案中,测试电容与悬浮球位置的关系呈现出非线性特征,且这种非线性随球体与电容极板间距离的增加而更加明显。相比之下,差分式方案展现出测试电容与磁悬浮球位移之间的线性关系,但在量程增加时,其测试灵敏度有所下降。得益于电容检测电路技术的不断进步,提出的差分式电容位移检测方案在超过6.4 mm的磁悬浮球位移范围内,有望实现纳米级的位移检测精度。
Two capacitive displacement detection schemes,single ended scheme and differential scheme are designed for precise and non⁃contact monitoring of the displacement of magnetic levitation sphere.Finite element simulation models are constructed for these two schemes using COMSOL Multiphysics software,and the relationship between the measured capacitance value and the displacement of the magnetic levitation sphere is analyzed.In the single ended scheme,the relationship between the test capacitor and the position of the levitated sphere exhibits nonlinear characteristics,and this nonlinearity becomes more pronounced as the distance between the sphere and the capacitor plate increases.In contrast,the differential scheme exhibits a linear relationship between the test capacitance and the displacement of the magnetic levitation sphere,but its testing sensitivity decreases as the range increases.Thanks to the continuous advancement of capacitance detection circuit technology,the proposed differential capacitance displacement detection scheme is expected to achieve nanometer level displacement detection precision in the displacement range of magnetic levitation sphere exceeding 6.4 mm.
作者
黄兴
花国祥
李伟伟
闫纪源
廉欣芸
HUANG Xing;HUA Guoxiang;LI Weiwei;YAN Jiyuan;LIAN Xinyun(School of Automation,Wuxi University,Wuxi 214105,China;School of Electrical and Electronic Engineering,North China Electric Power University,Beijing 102206,China;School of Automation,Nanjing University of Information Science&Technology,Nanjing 210044,China)
出处
《传感器与微系统》
CSCD
北大核心
2024年第11期135-138,共4页
Transducer and Microsystem Technologies
基金
江苏省自然科学基金青年基金资助项目(BK20230173)
无锡学院引进人才科研启动专项经费资助项目(2024r023)。
关键词
磁悬浮
电容传感器
位移测量
有限元分析
magnetic levitation
capacitive sensor
displacement measurement
finite element analysis
