摘要
综述了基于量子精密测量的中红外气体检测技术发展情况。随着半导体行业的发展,对电子工艺气体纯度的要求不断提升,传统中红外气体检测技术在痕量气体检测上面临灵敏度和精度的挑战。分析比较了光纤消逝波、光声光谱、傅里叶变换红外光谱、可调谐二极管激光吸收光谱和光腔衰荡光谱等技术的特点、应用现状及其局限性,并重点介绍了基于量子关联光谱的中红外气体检测技术,通过利用光量子探测器和频率上转换技术,突破了传统中红外探测器的性能瓶颈,显著提高了检测灵敏度和信噪比,该技术将成为未来的重点研究方向和技术突破口,为实现更高精度的痕量气体检测提供了重要参考。
This article reviews mid-infrared gas detection technology based on quantum precision measurements.With the development of the semiconductor industry,the requirements for the purity of electronic process gases continue to increase.Traditional mid-infrared gas detection technology faces sensitivity and accuracy challenges in trace gas detection.This article analyzes in detail the characteristics,application status and limitations of technologies such as fiber evanescent waves,photoacoustic spectroscopy,Fourier transform infrared spectroscopy,tunable diode laser absorption spectroscopy and optical cavity ring-down spectroscopy,and focuses on the introduction of quantum correlation spectroscopy.Mid-infrared gas detection technology breaks through the performance bottleneck of traditional mid-infrared detectors by utilizing photon quantum detectors and frequency up-conversion technology,significantly improving detection sensitivity and signal-to-noise ratio.This technology will become a key research direction in the future and This technological breakthrough provides an important reference for achieving higher-precision trace gas detection.
作者
朱天一
冯典英
许峰
董雅卓
张文申
侯倩倩
刘霞
王威
ZHU Tianyi;FENG Dianying;XU Feng;DONG Yazhuo;ZHANG Wenshen;HOU Qianqian;LIU Xia;WANG Wei(China North Industries Group 53rd Research Institute,Jinan 250031,China)
出处
《宇航计测技术》
CSCD
2024年第5期16-24,共9页
Journal of Astronautic Metrology and Measurement
关键词
高纯气体
超痕量分析
中红外
量子测量
High-purity gas
Ultratrace analysis
Mid-infrared
Quantum measurement
