摘要
在微分干涉相衬显微镜的基础上,加入波片相移装置及图像采集处理,建立了移相式微分干涉相衬显微测量系统;分析并解决了表面微观形貌测量中存在的一些技术难题;准确地重构出了物体的微观三维形貌,实现了物体的表面高度及粗糙度Ra的高精度测量。结果表明:粗糙度重复测量精度为1.2nm;形貌高度分辨率为4.6nm。
Phase stepping differential interference contrast microscopy measuring system is constructed,which is based on differential interference contrast microscopy,wave plate phase shifter device and image manage system.Some technical difficulties existed in the surface microscopy are analyzed and solved.Threedimensional surface microtopography of the sample is reconstructed.High accuracy quantitative measurements of surface height and roughness Ra are realized.The results show that measuring accuracy is 1.2 nm,the longitudinal resolution of the system is 4.6 nm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2002年第11期1141-1144,共4页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(59975052)
