摘要
微半球谐振陀螺的电极间隙一致性直接影响陀螺的输出性能,为满足陀螺的高精度间隙调整,利用静电电容检测的方法对电极间隙进行表征,并通过精密位移调节陀螺电极间隙。构建了陀螺装配误差模型,仿真分析装配误差对周向静电电容的影响,设计开发了高精度多通道电容同步检测电路,测量精度误差<1.8%,重复测试偏差<6%,实现了静电电容的高精度测量。搭建了高精度陀螺装配实验平台,基于采集的周向电容,微调电极间隙,降低周向电容的离散程度。最终完成陀螺高精度装配与固定。实验结果表明,陀螺周向间隙误差≤5.6%,周向静电电容标准差为14.47fF,离散系数为5.5%,装配精度显著提高。
The consistency of the electrode gap of the micro-hemispherical resonant gyro directly affects the output performance of the gyro,and in order to meet the high-precision gap adjusting of the gyro,electrostatic capacitance detection is used to characterize the electrode gap and to adjust the electrode gap of the gyro by precision displacement.A gyro assembly error model is constructed,the effect of assembly error on circumferential electrostatic capacitance is simulated and analyzed.A high-precision multi-channel capacitance synchronous detection circuit is designed,with the error of measurement accuracy<1.8%and the deviation of repeated testing<6%,which realizes the high-precision measurement of electrostatic capacitance.A high-precision gyro assembly experimental platform is built.Based on the collected circumferential capacitance,the electrode gap is fine-tuned to reduce the dispersion of the circumferential capacitance.The high-precision assembly and fixation of the gyro is finally completed.The experimental results show that the gyro's circumferential gap error is≤5.6%,the standard deviation of circumferential electrostatic capacitance is 14.47 fF,and the dispersion coefficient is 5.5%.The assembly precision is significantly improved.
作者
王大志
胡鑫
李义康
刘犇
王曦
梁世文
WANG Dazhi;HU Xin;LI Yikang;LIU Ben;WANG Xi;LIANG Shiwen(School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China;National Key Laboratory of High-Performance Precision Manufacturing,Dalian 116024,China;Ningbo Research Institute,Dalian University of Technology,Ningbo 315000,China;Institute of Electronic Engineering,Academy of Engineering Physics,Mianyang 621900,China)
出处
《中国惯性技术学报》
北大核心
2025年第1期82-88,共7页
Journal of Chinese Inertial Technology
基金
国家自然科学基金(62074138)
宁波市自然科学基金项目(2022J008)
中央高校基本科研业务费(DUT22LAB405)。
关键词
微半球谐振陀螺
静电电容
间隙调整
多通道电容同步检测
micro-hemispherical resonant gyroscope
electrostatic capacitance
gap adjustment
simultaneous multi-channel capacitance detection
