摘要
针对高温、腐蚀等复杂条件下的真空测试需求,提出了一种基于4H-SiC为敏感材料且可批量制造的微型化差分电容式真空计。通过有限元仿真分析,研究了力学敏感结构、电容结构等对传感器灵敏度及非线性度的影响。传感器敏感单元由圆形敏感膜与“开口型”双电容结构构成。仿真结果表明:该差分电容式敏感结构与单电容式结构相比,在0~1000 Pa测压范围内,灵敏度仅下降0.02 fF/Pa,非线性度从0.92%降低至0.37%,可为复杂环境下的真空压力测试提供可行的技术支撑。
In order to meet the requirements of vacuum testing under complex conditions such as high tem-perature and corrosion,a miniaturized differential capacitive vacuum gauge based on 4H-SiC as sensitive material is presented in this paper.The influence of mechanical sensitive structure and capacitance struc-ture on the sensitivity and nonlinearity of the sensor is studied by finite element simulation.The sensorsensitive unit is composed of a circular sensitive film and an"open mouth"double capacitance structure.The simulation results show that compared with the single capacitance structure,the sensitivity of the dif-ferential capacitance sensitive structure decreases by only 0.02 fF/Pa and the nonlinearity decreases from 0.92%to 0.37%in the range of 0~1000 Pa.This study provides feasible technical support for vacuum pressure testing in a complex environment.
作者
李鑫浦
张姝
雷程
张臻昊
李志强
余建刚
梁庭
LI Xinpu;ZHANG Shu;LEI Cheng;ZHANG Zhenhao;LI Zhiqiang;YU Jiangang;LIANG Ting(Key Laboratory of Instrument Science and Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China;Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China)
出处
《测试技术学报》
2025年第2期211-217,共7页
Journal of Test and Measurement Technology
基金
国家重点研发计划资助项目(2023YFB3208500)
山西省重点研发计划资助项目(2023020302010)
中央引导地方科技发展资助项目(YDZJSX20231B006)。
关键词
薄膜真空计
4H-SIC
差分电容
有限元分析
diaphragm vacuum meter
4H-SiC
differential capacitance
finite element analysis
