摘要
用离子束混合技术在纯铁表面形成了均匀的金黄色TiN薄膜。性能分析表明,离子束混合处理的样品具有很高的表面硬度和优异的耐蚀性能。本文首次运用X光薄膜衍射附件,令人满意地检测出氮离子束混合层的物相是TiN,而用普通X光衍射仪检测不出离子束混合层的物相,这一新的薄膜衍射分析技术将给离子注入、离子束混合的深入研究提供强有力的手段。
The golden TiN thin films was successfuly formd on the surface of the sample of titanium deposited Iron by nitrogen ion beam mixing. The testings of thefilm properties indicated that the samples treated by ion beam mixing are of high hardness and excellent corrosion resistance. The X-ray diffraction equipment accessories on thin film was firstl yused for analysising implantation film, at home and abroad, and TiN is found as the matter phase of the film prepared by nitrogen ion beam mixing. TiN, however, isn't discoverd by ordinary X-ray diffractometer under the same conditions.
出处
《机械工程材料》
CAS
CSCD
1992年第3期42-45,56,共5页
Materials For Mechanical Engineering
