摘要
谐振式硅微机械加速度计是新型高精度的微机电系统传感器.作者选用双端固定音叉作为谐振器,设计了一种硅微谐振式加速度计.设计中,使用了有限元分析软件进行了大量辅助分析,对传感器的工作情况进行了仿真.通过模拟和计算,预先估算出谐振器固有频率、应力分布情况以及传感器基本性能参数,这对传感器工艺流程设计及结构改进具有重要意义.有限元分析结果显示,传感器的灵敏度大约为2Hz/g.
Silicon micromachined resonant accelerometer is a new kind of microelectromechanical system(MEMS)sensor with high sensitivity. A new structure utilizing doubleended tuning fork as resonator is proposed in this paper. In the design process, finite element analysis software has been used to simulate the working condition, and most of the computation has been done. Through the simulation and calculation, the natural frequency and stress distribution are estimated, which is important to the process design and construction improvement. The analysis reveals that with current parameters, the sensitivity of the sensor is about 2 Hz/g.
出处
《天津大学学报（自然科学与工程技术版）》
EI
CAS
CSCD
北大核心
2003年第4期465-467,共3页
Journal of Tianjin University：Science and Technology
