摘要
提出了实用的Mirau干涉头结构,降低了制作工艺要求。物镜为长工作距物镜,由光焦度较大的正光组和光焦度较小的负光组组成。设计了5种不同透射/反射率的分束板,平衡了干涉光强。Mirau干涉物镜的NA=0.3,β=-10,工作距5mm,横向分辨率Δx≥0.887μm,景深Δ=±2.956μm。
Practical Mirau interference head structure was developed to reduce fabrication requirements.A long working-distance objective was designed which consists of a larger positive power lens and a smaller negative power lens.The intensity of the interference pattern was balanced using beam splitters with different transmission/reflection ratio.The parameters of the Mirau interference objective are as follows:numerical aperture NA=0.3,the magnification β=-10,working distance 5 mm,lateral resolution Δx≥0.887 μm and depth of field Δ=±2.956 μm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2003年第12期1292-1295,共4页
Journal of Optoelectronics·Laser
基金
天津市"131"人才工程第一层次人选资助项目
天津市自然科学基金资助项目(023602411)
