摘要
介绍了在激发氢气和碳氢混合气体的“活化”发光状态下使金刚石沉积的CVD金刚石制造工艺原理和“厚膜”CVD金刚石的新工艺。由于CVD金刚石的聚晶结构使其具有超过天然金刚石断裂韧性的优异特点 ,因此可作为切削刀具材料使用。
The fundaments of CVD diamond process where hydrogen gas and hydrocarbon gas mixtures are energized to 'activated' glowing state that allows CVD diamond to be deposited, and a new 'thick film' CVD diamond process are introduced. The advantages of CVD diamond as a cutting tool material result from diamond's unmatched hardness, good characteristics of high fracture toughness of CVD diamond beyond natural diamond due to its polycrystalline structure are also introduced. The practical applications of CVD diamond material in high performance cutting tools and dressing tools are presented in this paper.
出处
《理化检验（物理分册）》
CAS
2003年第5期250-252,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
