摘要
提出一种应用光电共轭原理实现边界检出并进行激光扫描测量直径的新方法。采用该方法 的测量系统中,参考信号是测量信号的反向共轭函数,两函数的一对交点与被测工件边界相对应,工件直径可通过测量两函数交点之间的距离获得。实践验证了该方法的可行性,其边界检出精度±1μm,连续工作漂移不大于±5μm。
Signal characteristics of the measuring system is described and a new method based on photo-electric conjugate principle to distinguish boundaries is studied. In the new method, the reference signal is conjugate with scanning one, and two functions have a couple of cross points which are responding to the boundaries of object to be measured, so the diameter can be obtained via measuring the distant between two cross points. The feasibility of the method is tested by practice with the accuracy of boundary distinguishing up to +/- 1-micron, and measuring error within +/- 5-micron for continuous working.
出处
《光电工程》
CAS
CSCD
北大核心
2004年第2期44-47,共4页
Opto-Electronic Engineering
关键词
直径测量
激光扫描
光电共轭方法
Diameter measurement
Laser scanning
Photo-electric conjugate method
