摘要
本文对牵引分子泵抽气机理进行了深入分析，考虑了通道返流和工作间隙泄漏对泵抽气性能的影响。采用有限差分法对通道内气体分子宏观运动速度分布进行了计算，提 出了牵引分子泵二维抽气理论。
A further research on the pumping mechanism of molecular drag pump (MDP) has been made in this paper. The effect of back flow and leakages in MDP on the pump's performance is considered and the speed distribution of gas in the channels by the finite difference methods will be calculated, the pumping theory of MDP at two-dimensonal space is introduced.
出处
《真空》
CAS
北大核心
1992年第4期1-7,共7页
Vacuum
