摘要
本文综述了当前最具代表性的几类新型半导体磁敏传感器的基本原理和典型结构,详细比较和分析了它们各自的特点和在制作、应用上的限制,扼要介绍了它们的研制动态和主要应用。
In this paper,the basic principles and the typical structures of some representative semiconductor magnetic sensors at present time are deseribed comprehensively. Their characteristics and the limits on fabrication and application are compared and analyzed closely. Their developing situation and major applications are also introduced briefly.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1992年第1期65-70,共6页
Research & Progress of SSE
关键词
磁敏传感器
超晶格
传感器
半导体
Magnetical Sensor, Supperlattice, Vector, Integration
