With the development of micro-electr o-mechanical system(MEMS) technolog y,the MEMS-based capacitive sensor has been widely applied in the field of ele ctron components.However,the capacitance of the micromachined sen...With the development of micro-electr o-mechanical system(MEMS) technolog y,the MEMS-based capacitive sensor has been widely applied in the field of ele ctron components.However,the capacitance of the micromachined sensor is so sma ll that the detection of the smaller value change of the capacitance is a great challenge.Based on the principle of charging and discharging of the capacitor,a kind of pulse width modulated differential circuit is introduced in this paper.For subsequent amplification,a modified amplifier is presented.The different ial circuit converts the weak capacitance change to the change of the pulse widt h of the output voltage,and the linear relationship can be obtained.And the mo dified amplifier implements the processes of amplification and filtering synchro nously,and a large DC output voltage can be obtained by the lo w-pass filter.T he designed circuits have advantages as simplified circuit,high voltage stabili ty,perfect linearity and resolution.Besides,it is feasible to be integrated w ith the sensor to largely reduce the transmission error and interference.展开更多
The design,fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced.The consistency of the resonance frequency and the sensitivity of the array are tested.Moreover,we detec...The design,fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced.The consistency of the resonance frequency and the sensitivity of the array are tested.Moreover,we detect the directivity and the multi-target identification ability of the array.The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results.This paper analyzes this problem in detail and points out the direction of improvement.As for the directivity,the actual result is consistent with the theoretical one.The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72°when the distance between the sensor array and measured objects is 2 m.展开更多
A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the ...A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the sensor.On the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation analysis.The boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic signal.The membrane-beam microstructure is fabricated integrally by MEMS manufacturing technology.Finally,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated model.The sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.展开更多
基金National High Technology Research and Development Program of China ("863"Program) (No.2011AA040404)National Natural Science Foundation of China(No.61127008)
文摘With the development of micro-electr o-mechanical system(MEMS) technolog y,the MEMS-based capacitive sensor has been widely applied in the field of ele ctron components.However,the capacitance of the micromachined sensor is so sma ll that the detection of the smaller value change of the capacitance is a great challenge.Based on the principle of charging and discharging of the capacitor,a kind of pulse width modulated differential circuit is introduced in this paper.For subsequent amplification,a modified amplifier is presented.The different ial circuit converts the weak capacitance change to the change of the pulse widt h of the output voltage,and the linear relationship can be obtained.And the mo dified amplifier implements the processes of amplification and filtering synchro nously,and a large DC output voltage can be obtained by the lo w-pass filter.T he designed circuits have advantages as simplified circuit,high voltage stabili ty,perfect linearity and resolution.Besides,it is feasible to be integrated w ith the sensor to largely reduce the transmission error and interference.
基金supported by the National High Technology Research and Development Program of China(No.2011AA040404)the Special Fund of the National Natural Science Foundation of China(No.61127008)
文摘The design,fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are introduced.The consistency of the resonance frequency and the sensitivity of the array are tested.Moreover,we detect the directivity and the multi-target identification ability of the array.The results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical results.This paper analyzes this problem in detail and points out the direction of improvement.As for the directivity,the actual result is consistent with the theoretical one.The results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72°when the distance between the sensor array and measured objects is 2 m.
基金Project supported by the National Natural Science Foundation of China(No.61127008)
文摘A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the sensor.On the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation analysis.The boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic signal.The membrane-beam microstructure is fabricated integrally by MEMS manufacturing technology.Finally,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated model.The sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.
