In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ...In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ap- paratus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer＇s specification value.展开更多
The accurate measurement method of ultrasonic velocity by the pulse interference method with eliminating the diffraction effect has been investigated in VHF range experimentally. Two silicate glasses were taken as the...The accurate measurement method of ultrasonic velocity by the pulse interference method with eliminating the diffraction effect has been investigated in VHF range experimentally. Two silicate glasses were taken as the specimens, their frequency dependences of longitudinal velocities were measured in the frequency range 50-350 MHz, and the phase advances of ultrasonic signals caused by diffraction effect were calculated using A. O. Williams' theoretical expression. For the frequency dependences of longitudinal velocities, the measurement results were in good agreement with the simulation ones in which the phase advances were included. It has been shown that the velocity error due to diffraction effect can be corrected very well by this method.展开更多
基金supported by the National Natural Science Foundation of China under Grant Nos.61275096 and 51275120
文摘In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ap- paratus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer＇s specification value.
文摘The accurate measurement method of ultrasonic velocity by the pulse interference method with eliminating the diffraction effect has been investigated in VHF range experimentally. Two silicate glasses were taken as the specimens, their frequency dependences of longitudinal velocities were measured in the frequency range 50-350 MHz, and the phase advances of ultrasonic signals caused by diffraction effect were calculated using A. O. Williams' theoretical expression. For the frequency dependences of longitudinal velocities, the measurement results were in good agreement with the simulation ones in which the phase advances were included. It has been shown that the velocity error due to diffraction effect can be corrected very well by this method.
