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添加剂对化学沉积速率的影响 被引量:16
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作者 胡光辉 吴辉煌 +1 位作者 杨防祖 王森林 《物理化学学报》 SCIE CAS CSCD 北大核心 2004年第3期327-330,共4页
基于化学镀Ni-W-P和Ni-P体系中,添加剂LaCl3、乳酸、Fe2(SO4)3、硫脲和2,2'-联吡啶的浓度对沉积速率的影响表现出较为一致的变化规律,即随添加剂浓度的增加,出现最大沉积速率的实验事实,建立了一种吸附模型并导出添加剂加速化学沉... 基于化学镀Ni-W-P和Ni-P体系中,添加剂LaCl3、乳酸、Fe2(SO4)3、硫脲和2,2'-联吡啶的浓度对沉积速率的影响表现出较为一致的变化规律,即随添加剂浓度的增加,出现最大沉积速率的实验事实,建立了一种吸附模型并导出添加剂加速化学沉积的公式.根据该公式和实验结果进行曲线拟合,得到相当吻合的结果.由拟合结果可得到一些参数值,如吸附平衡常数等.添加剂在基体上的吸附平衡常数(K1)大于已吸附了还原剂的表面上的吸附平衡常数(K2).K1值大表明添加剂在基体表面吸附能力更强.LaCl3、硫脲和2,2'-联吡啶的K1、K2值远大于乳酸、Fe2(SO4)3的K1、K2值,这表明LaCl3、硫脲和2,2'-联吡啶的吸附能力远强于乳酸、Fe2(SO4)3的,因此,LaCl3、硫脲和2,2'-联吡啶所引起的沉积速率峰值的浓度远小于乳酸、Fe2(SO4)3的. 展开更多
关键词 化学 镀液添加剂 化学沉积速率 加速作用 作用机理 氯化镧 硫酸铁 乳酸 硫脲 2 2’-联吡啶
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络合剂和添加剂对化学镀铜影响的电化学研究 被引量:24
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作者 谷新 王周成 林昌健 《电化学》 CAS CSCD 2004年第1期14-19,共6页
 以CuSO4·5H2O作主盐,乙二胺四乙酸二钠盐(Na2EDTA)作主络合剂,三乙醇胺(TEA)作辅助络合剂,2,2′_联吡啶(dipyridine)作添加剂,组成化学镀铜液体系,研究络合剂、添加剂对该镀液电化学极化性能的影响,并结合化学沉积速率考察TEA和...  以CuSO4·5H2O作主盐,乙二胺四乙酸二钠盐(Na2EDTA)作主络合剂,三乙醇胺(TEA)作辅助络合剂,2,2′_联吡啶(dipyridine)作添加剂,组成化学镀铜液体系,研究络合剂、添加剂对该镀液电化学极化性能的影响,并结合化学沉积速率考察TEA和2,2′_联吡啶对镀液性能的影响. 展开更多
关键词 化学镀铜技术 化学 络合剂 添加剂 极化性能 化学沉积速率 峰电流值
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Fabrication of Hydrogenated Microcrystalline Silicon Thin Films at Low Temperature by VHF-PECVD
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作者 杨恢东 吴春亚 +7 位作者 麦耀华 李洪波 薛俊明 李岩 任慧智 张丽珠 耿新华 熊绍珍 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第9期902-908,共7页
Using H 2 diluted silane,series of μc Si∶H films are fabricated at low temperature with VHF PECVD.The thickness measurements reveal that the deposition rates are obviously enhanced with higher plasma excitation ... Using H 2 diluted silane,series of μc Si∶H films are fabricated at low temperature with VHF PECVD.The thickness measurements reveal that the deposition rates are obviously enhanced with higher plasma excitation frequency or working pressure,but increase firstly and then decrease with the increase of plasma power density.Raman spectra show that the crystallinity and the average grain sizes of the films strongly depend on the temperature of substrate and the concentration of silane.However,the plasma excitation frequency only has effect on the crystallinity,and a maximum occurs during the further increase of plasma excitation frequency.From XRD and TEM experiments,three preferential crystalline orientations (111),(220) and (311) are observed,and the average grain sizes are different for every crystalline orientation. 展开更多
关键词 μc Si∶H thin films VHF PECVD deposition rate CRYSTALLINITY
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Online evaluation of electroless deposition rate by electrochemical noise method 被引量:3
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作者 Z.RAJABALIZADEH D.SEIFZADEH A.HABIBI-YANGJEH 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2019年第8期1753-1762,共10页
Continuous noise resistance calculation(CNRC)technique was used for online determination of the electroless nickel deposition rate on zirconium pretreated magnesium alloy.For this purpose,the noise resistance(R_n) var... Continuous noise resistance calculation(CNRC)technique was used for online determination of the electroless nickel deposition rate on zirconium pretreated magnesium alloy.For this purpose,the noise resistance(R_n) variation with time was calculated for the pretreated alloy surface in the electroless plating solution.The CNRC results were described by energy dispersive X-ray spectroscopy(EDS)and scanning electron microscopy(SEM)techniques.Also,potentiodynamic polarization and gravimetric measurements were used for determination of the electroless deposition rate at the same time period and the results were compared with the CNRC results.The Rn variation with plating time shows that the electroless plating consists of different stages with various deposition rates.The results of the CNRC and polarization methods were not in acceptable agreement due to the limitations of the polarization method for online monitoring of the deposition rate.However,the results of the gravimetric measurements were in complete agreement with the CNRC technique and so,the CNRC can be considered as suitable tool for online evaluation of the electroless deposition rate. 展开更多
关键词 magnesium alloy electroless plating deposition rate electrochemical noise SEM EDS
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Weak mismatch epitaxy and structural feedback in graphene growth on copper foil
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作者 Neil R. Wilson Alexander J. Marsden +11 位作者 Mohammed Saghir Catherine J. Bromley Renald Schaub Giovanni Costantini Thomas W. White Cerianne Partridge Alexei Barinov Pavel Dudin Ana M. Sanchez James J. Mudd Marc Walker Gavin R. Bell 《Nano Research》 SCIE EI CAS CSCD 2013年第2期99-112,共14页
Graphene growth by low-pressure chemical vapor deposition on low cost copper foils shows great promise for large scale applications. It is known that the local crystallography of the foil influences the graphene growt... Graphene growth by low-pressure chemical vapor deposition on low cost copper foils shows great promise for large scale applications. It is known that the local crystallography of the foil influences the graphene growth rate. Here we find an epitaxial relationship between graphene and copper foil. Interfacial restructuring between graphene and copper drives the formation of (nl0) facets on what is otherwise a mostly Cu(100) surface, and the facets in turn influence the graphene orientations from the onset of growth. Angle resolved photoemission shows that the electronic structure of the graphene is decoupled from the copper indicating a weak interaction between them. Despite this, two preferred orientations of graphene are found, ±8° from the Cu[010] direction, creating a non-uniform distribution of graphene grain boundary misorientation angles. Comparison with the model system of graphene growth on single crystal Cu(110) indicates that this orientational alignment is due to mismatch epitaxy. Despite the differences in symmetry the orientation of the graphene is defined by that of the copper. We expect these observations to not only have importance for controlling and understanding the growth process for graphene on copper, but also to have wider implications for the growth of two-dimensional materials on low cost metal substrates. 展开更多
关键词 GRAPHENE chemical vapordeposition mismatch epitaxy structural feedback low energy electrondiffraction angle resolvedphoto-emissionspectroscopy (ARPES)
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