Titanium aluminum nitride （TiAlN） film, as a possible substitute for the conventional tantalum nitride （TAN） or tantalum-aluminum （TaAl） heater resistor in inkjet printheads, was deposited on a Si（100） substra...Titanium aluminum nitride （TiAlN） film, as a possible substitute for the conventional tantalum nitride （TAN） or tantalum-aluminum （TaAl） heater resistor in inkjet printheads, was deposited on a Si（100） substrate at 400 ℃ by radio frequency （RF） magnetron co-sputtering using titanium nitride （TIN） and aluminum nitride （AlN） as ceramic targets. The temperature coefficient of resistivity （TCR） and oxidation resistance, which are the most important properties of a heat resistor, were studied depending on the plasma power density applied during sputtering. With the increasing plasma power density, the crystallinity, grain size and surface roughness of the applied film increased, resulting in less grain boundaries with large grains. The Ti, Al and N binding energies obtained from X-ray photoelectron spectroscopy analysis disclosed the nitrogen deficit in the TiAlN stoichiometry that makes the films more electrically resistive. The highest oxidation resistance and the lowest TCR of-765.43×10^-6 K-l were obtained by applying the highest plasma power density.展开更多
A convenient numerical calculation method (inverse spline interpolation) for all-time apparent resistivity intransient electromagnetic method (TEM) is proposed in this paper. Characteristic of early and late normalize...A convenient numerical calculation method (inverse spline interpolation) for all-time apparent resistivity intransient electromagnetic method (TEM) is proposed in this paper. Characteristic of early and late normalized inductiveelectromotive force was investigated. According to the turning point, the transient process is divided into the earlyphase, the turning point, and the late phase. Afterwards, apparent resistivity is obtained through inverse spline interpo-lation in the early and the late phases, respectively. Finally, the resistivities of the early-time and the late-time wereconnected together by the turning point. The result shows that the inverse spline method is feasible and the method alsolays a foundation for initial model construction in the TEM automatic inversion.展开更多
基金Project (M-2009-01-0029) supported by Fundamental R&D Program for Core Technology of Materials, Korea
文摘Titanium aluminum nitride （TiAlN） film, as a possible substitute for the conventional tantalum nitride （TAN） or tantalum-aluminum （TaAl） heater resistor in inkjet printheads, was deposited on a Si（100） substrate at 400 ℃ by radio frequency （RF） magnetron co-sputtering using titanium nitride （TIN） and aluminum nitride （AlN） as ceramic targets. The temperature coefficient of resistivity （TCR） and oxidation resistance, which are the most important properties of a heat resistor, were studied depending on the plasma power density applied during sputtering. With the increasing plasma power density, the crystallinity, grain size and surface roughness of the applied film increased, resulting in less grain boundaries with large grains. The Ti, Al and N binding energies obtained from X-ray photoelectron spectroscopy analysis disclosed the nitrogen deficit in the TiAlN stoichiometry that makes the films more electrically resistive. The highest oxidation resistance and the lowest TCR of-765.43×10^-6 K-l were obtained by applying the highest plasma power density.
基金Project 40344022 supported by National Natural Science Foundation of China
文摘A convenient numerical calculation method (inverse spline interpolation) for all-time apparent resistivity intransient electromagnetic method (TEM) is proposed in this paper. Characteristic of early and late normalized inductiveelectromotive force was investigated. According to the turning point, the transient process is divided into the earlyphase, the turning point, and the late phase. Afterwards, apparent resistivity is obtained through inverse spline interpo-lation in the early and the late phases, respectively. Finally, the resistivities of the early-time and the late-time wereconnected together by the turning point. The result shows that the inverse spline method is feasible and the method alsolays a foundation for initial model construction in the TEM automatic inversion.
