Nanogrinding of SiC wafers with high flatness and low subsurface damage was proposed and nanogrinding experiments were carried out on an ultra precision grinding machine with fine diamond wheels. Experimental results ...Nanogrinding of SiC wafers with high flatness and low subsurface damage was proposed and nanogrinding experiments were carried out on an ultra precision grinding machine with fine diamond wheels. Experimental results show that nanogrinding can produce flatness less than 1.0μm and a surface roughness Ra of 0.42nm. It is found that nanogrinding is capable of producing much flatter SiC wafers with a lower damage than double side lapping and mechanical polishing in much less time and it can replace double side lapping and mechanical polishing and reduce the removal amount of chemical mechanical polishing.展开更多
This paper deals with the machining process using magnetic abrasives. Using an apparatus designed and made, a series of experiments are carried out, where the workpiece is cylindrical and the magnetic abrasives used ...This paper deals with the machining process using magnetic abrasives. Using an apparatus designed and made, a series of experiments are carried out, where the workpiece is cylindrical and the magnetic abrasives used are mainly Fe and Al 2O 3, for investigating the effects of machining time, working gap, rotating speed of workpieces, magnetic flux density on machining efficiency and surface roughness. At the end of this paper, the machining mechanism is also discussed.展开更多
The purpose of this study is to develop a twin wheel creep-feed grinding machine using continuous dressing to machine precise axisymmetric turbine blades that have been difficult to machine using a conventional creep-...The purpose of this study is to develop a twin wheel creep-feed grinding machine using continuous dressing to machine precise axisymmetric turbine blades that have been difficult to machine using a conventional creep-feed machine.In order to develop such a machine,3D-modeling and machine simulations were performed and a twin wheel creep-feed grinding machine was manufactured.Furthermore,the axisymmetric precision of the machined workpieces through practical machining was evaluated and the quality of the continuous dressing effect of the developed machine was established.In addition,experimental considerations for a proper dresser-to-wheel speed ratio and proper feed rate of the dresser were carried out.As a result,a twin wheel creep-feed grinding machine with continuous dressing is developed through machine simulation,manufacturing and performance evaluation.Optimum condition for the dresser feed rate is 0.3μm/rev.In cases of large dressor-to-wheel speed ratio,grinding efficiency can be enhanced,but the surface roughness shows a conflicting trend.Developed twin wheel creep-feed grinding machine has satisfactory appraisal with regard to surface roughness,flatness,and parallelism.Satisfactory surface roughness below 0.1μm can be obtained for the blade of aircraft.However,in order to perform precise machining,it is necessary to improve the structure of the twin wheel creep-feed grinding machine.展开更多
In this paper, the effect of of flank wear polycrystalline cubic boron nitride （PCBN） tools on residual stresses, white layer and roughness of machined workpiece surfaces is studied. Experimental results indicate th...In this paper, the effect of of flank wear polycrystalline cubic boron nitride （PCBN） tools on residual stresses, white layer and roughness of machined workpiece surfaces is studied. Experimental results indicate that with the increase of the tool wear, the surface of the machined workpiece tends to generate tensile residual stresses, and white layer becomes clearly thicker and uneven on the workpiece surface. The effect of the flank wear on the surface roughness is less within some range of flank wear value. The results show that it is possible to produce ideal surface integrality levels by controlling the tool flank wear.展开更多
基金Project (50975040) supported by the National Natural Science Foundation of China
文摘Nanogrinding of SiC wafers with high flatness and low subsurface damage was proposed and nanogrinding experiments were carried out on an ultra precision grinding machine with fine diamond wheels. Experimental results show that nanogrinding can produce flatness less than 1.0μm and a surface roughness Ra of 0.42nm. It is found that nanogrinding is capable of producing much flatter SiC wafers with a lower damage than double side lapping and mechanical polishing in much less time and it can replace double side lapping and mechanical polishing and reduce the removal amount of chemical mechanical polishing.
文摘This paper deals with the machining process using magnetic abrasives. Using an apparatus designed and made, a series of experiments are carried out, where the workpiece is cylindrical and the magnetic abrasives used are mainly Fe and Al 2O 3, for investigating the effects of machining time, working gap, rotating speed of workpieces, magnetic flux density on machining efficiency and surface roughness. At the end of this paper, the machining mechanism is also discussed.
基金Work supported by the Second Stage of Brain Korea 21 Project
文摘The purpose of this study is to develop a twin wheel creep-feed grinding machine using continuous dressing to machine precise axisymmetric turbine blades that have been difficult to machine using a conventional creep-feed machine.In order to develop such a machine,3D-modeling and machine simulations were performed and a twin wheel creep-feed grinding machine was manufactured.Furthermore,the axisymmetric precision of the machined workpieces through practical machining was evaluated and the quality of the continuous dressing effect of the developed machine was established.In addition,experimental considerations for a proper dresser-to-wheel speed ratio and proper feed rate of the dresser were carried out.As a result,a twin wheel creep-feed grinding machine with continuous dressing is developed through machine simulation,manufacturing and performance evaluation.Optimum condition for the dresser feed rate is 0.3μm/rev.In cases of large dressor-to-wheel speed ratio,grinding efficiency can be enhanced,but the surface roughness shows a conflicting trend.Developed twin wheel creep-feed grinding machine has satisfactory appraisal with regard to surface roughness,flatness,and parallelism.Satisfactory surface roughness below 0.1μm can be obtained for the blade of aircraft.However,in order to perform precise machining,it is necessary to improve the structure of the twin wheel creep-feed grinding machine.
基金Supported by the National Natural Science Foundation of China（No.50875068）,and the National High Technology Research and Development Programme of China（No.2009AA044302）.
文摘In this paper, the effect of of flank wear polycrystalline cubic boron nitride （PCBN） tools on residual stresses, white layer and roughness of machined workpiece surfaces is studied. Experimental results indicate that with the increase of the tool wear, the surface of the machined workpiece tends to generate tensile residual stresses, and white layer becomes clearly thicker and uneven on the workpiece surface. The effect of the flank wear on the surface roughness is less within some range of flank wear value. The results show that it is possible to produce ideal surface integrality levels by controlling the tool flank wear.
