Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an ...Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.展开更多
In this work,the dynamics and operation of the totally reboiled reactive distillation columns are visualized in terms of transfer function based process models.This kind of processes is found to be characterized by un...In this work,the dynamics and operation of the totally reboiled reactive distillation columns are visualized in terms of transfer function based process models.This kind of processes is found to be characterized by underdamped step responses due to the special topological configuration and the intricate interplay between the reaction operation and the separation operation involved.The under-dampness can be substantially alleviated through the tight inventory control of bottom reboiler and this presents beneficial effects to process dynamics and operation.Two totally reboiled reactive distillation columns,separating,respectively,a hypothetical synthesis reaction from reactants A and B to product C,and a real decomposition reaction from 1,4-butanediol to tetrahydrofuran and water,are employed to demonstrate these uncommon behaviors.The results obtained give full support to the above qualitative interpretation.Despite the strong influences of reaction kinetics and thermodynamic properties of the reacting mixtures,the totally reboiled reactive distillation columns are generally considered to present such unique behaviors and require tight inventory control of bottom reboiler to facilitate their control system development.展开更多
Consistent high-quality and defect-free production is the demand of the day. The product recall not only increases engineering and manufacturing cost but also affects the quality and the reliability of the product in ...Consistent high-quality and defect-free production is the demand of the day. The product recall not only increases engineering and manufacturing cost but also affects the quality and the reliability of the product in the eye of users. The monitoring and improvement of a manufacturing process are the strength of statistical process control. In this article we propose a process monitoring memory-based scheme for continuous data under the assumption of normality to detect small non-random shift patterns in any manufacturing or service process.The control limits for the proposed scheme are constructed. The in-control and out-of-control average run length(AVL) expressions have been derived for the performance evaluation of the proposed scheme. Robustness to non-normality has been tested after simulation study of the run length distribution of the proposed scheme, and the comparisons with Shewhart and exponentially weighted moving average(EWMA) schemes are presented for various gamma and t-distributions. The proposed scheme is effective and attractive as it has one design parameter which differentiates it from the traditional schemes. Finally, some suggestions and recommendations are made for the future work.展开更多
文摘Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.
基金Supported by The National Natural Science Foundation of China(21076015,21376018,and 21576014)The Fundamental Research Funds for the Central Universities(ZY1503)
文摘In this work,the dynamics and operation of the totally reboiled reactive distillation columns are visualized in terms of transfer function based process models.This kind of processes is found to be characterized by underdamped step responses due to the special topological configuration and the intricate interplay between the reaction operation and the separation operation involved.The under-dampness can be substantially alleviated through the tight inventory control of bottom reboiler and this presents beneficial effects to process dynamics and operation.Two totally reboiled reactive distillation columns,separating,respectively,a hypothetical synthesis reaction from reactants A and B to product C,and a real decomposition reaction from 1,4-butanediol to tetrahydrofuran and water,are employed to demonstrate these uncommon behaviors.The results obtained give full support to the above qualitative interpretation.Despite the strong influences of reaction kinetics and thermodynamic properties of the reacting mixtures,the totally reboiled reactive distillation columns are generally considered to present such unique behaviors and require tight inventory control of bottom reboiler to facilitate their control system development.
文摘Consistent high-quality and defect-free production is the demand of the day. The product recall not only increases engineering and manufacturing cost but also affects the quality and the reliability of the product in the eye of users. The monitoring and improvement of a manufacturing process are the strength of statistical process control. In this article we propose a process monitoring memory-based scheme for continuous data under the assumption of normality to detect small non-random shift patterns in any manufacturing or service process.The control limits for the proposed scheme are constructed. The in-control and out-of-control average run length(AVL) expressions have been derived for the performance evaluation of the proposed scheme. Robustness to non-normality has been tested after simulation study of the run length distribution of the proposed scheme, and the comparisons with Shewhart and exponentially weighted moving average(EWMA) schemes are presented for various gamma and t-distributions. The proposed scheme is effective and attractive as it has one design parameter which differentiates it from the traditional schemes. Finally, some suggestions and recommendations are made for the future work.
