A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabr...A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.展开更多
SRC-RC混合框架结构的过渡层处因强度和刚度的突变而影响结构的抗震性能。文章运用有限元软件SAP2000建立了13个SRC-RC竖向混合框架结构模型,对其进行静力弹塑性分析;从模型水平承载力、变形能力、结构位移基底剪力—顶点位移关系、塑...SRC-RC混合框架结构的过渡层处因强度和刚度的突变而影响结构的抗震性能。文章运用有限元软件SAP2000建立了13个SRC-RC竖向混合框架结构模型,对其进行静力弹塑性分析;从模型水平承载力、变形能力、结构位移基底剪力—顶点位移关系、塑性铰分布等4个方面,研究其对抗震性能的影响。结果表明:当结构过渡层处于中下部、两侧的过渡层柱位于楼层最高处,而中间过渡层柱位于楼层次之时,SRC-RC竖向混合框架结构的水平承载能力最高,其较RC框架结构提高了398 k N;SRC-RC竖向混合框架结构过渡层柱从3~5层升至4~6层时,结构的平均延性系数提高2.44%;SRC-RC竖向混合框架结构形成了比较多的塑性铰,其可吸收地震释放的能量,避免了在罕遇地震作用下发生倒塌,具有较好的延性。展开更多
文摘A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.
文摘SRC-RC混合框架结构的过渡层处因强度和刚度的突变而影响结构的抗震性能。文章运用有限元软件SAP2000建立了13个SRC-RC竖向混合框架结构模型,对其进行静力弹塑性分析;从模型水平承载力、变形能力、结构位移基底剪力—顶点位移关系、塑性铰分布等4个方面,研究其对抗震性能的影响。结果表明:当结构过渡层处于中下部、两侧的过渡层柱位于楼层最高处,而中间过渡层柱位于楼层次之时,SRC-RC竖向混合框架结构的水平承载能力最高,其较RC框架结构提高了398 k N;SRC-RC竖向混合框架结构过渡层柱从3~5层升至4~6层时,结构的平均延性系数提高2.44%;SRC-RC竖向混合框架结构形成了比较多的塑性铰,其可吸收地震释放的能量,避免了在罕遇地震作用下发生倒塌,具有较好的延性。
