A two-staged membrane separation process for hydrogen recovery from refinery gases is introduced. The principle of the gas membrane separation process and the influence of the operation temperatures are analyzed. As t...A two-staged membrane separation process for hydrogen recovery from refinery gases is introduced. The principle of the gas membrane separation process and the influence of the operation temperatures are analyzed. As the conventional PID controller is difficult to make the operation temperatures steady, a fuzzy self-tuning PID control algorithm is proposed. The application shows that the algorithm is effective, the operation temperatures of both stages can be controlled steadily, and the operation flexibility and adaptability of the hydrogen recovery unit are enhanced with safety. This study lays a foundation to optimize the control of the membrane separation process and thus ensure the membrane performance.展开更多
In rapid thermal processing of a semiconductor wafer, it is important to keep a given temperature rising speed of the wafer during the temperature rising process. We made an experimental apparatus to measure the tempe...In rapid thermal processing of a semiconductor wafer, it is important to keep a given temperature rising speed of the wafer during the temperature rising process. We made an experimental apparatus to measure the temperature rising speed of a ceramic ball of 2 mm in diameter heated with four halogen lamp heaters. The heating rate of the halogen lamp heaters was controlled by computer to keep a given temperature rising speed of 50 ℃/s with a controlling time interval of 0.1 s. We examined the effect of various heating control methods on the error of the temperature rising speed of the ceramic ball. We found that a combined method of control with prepared correlation and PID （proportional integral derivative） control is a good method to decrease the error of the temperature rising speed. The average error of the temperature rising speed is 0.5 ℃/s, and the repetition error is almost zero for the temperature rising speed of 50 ℃/s from 330 ℃ to 370 ℃. We also measured the effects of artificial control delay time and measuring error of the monitoring temperature on the error of the temperature rising speed.展开更多
After heat is metered in each house unit,the heating system is regulated by variable flow.The temperature of the return w ater is controlled to regulate the flow to realize the temperature regulation.According to the ...After heat is metered in each house unit,the heating system is regulated by variable flow.The temperature of the return w ater is controlled to regulate the flow to realize the temperature regulation.According to the characteristics of the temperature control w ith big inertia,pure time-delay and degeneration,a fuzzy adaptive PID controller is designed w ith the advantages of the fuzzy control and PID algorithm,and the simulation model is established according to the characteristics of heating metering system.Simulation results show that the fuzzy adaptive PID controller proposed has small overshoot,short oscillation cycle,high precision and strong anti-jamming capability in comparison w ith conventional PID controller,w hich could meet the requirement of the dynamic and steady-state performance of the heating process.展开更多
文摘A two-staged membrane separation process for hydrogen recovery from refinery gases is introduced. The principle of the gas membrane separation process and the influence of the operation temperatures are analyzed. As the conventional PID controller is difficult to make the operation temperatures steady, a fuzzy self-tuning PID control algorithm is proposed. The application shows that the algorithm is effective, the operation temperatures of both stages can be controlled steadily, and the operation flexibility and adaptability of the hydrogen recovery unit are enhanced with safety. This study lays a foundation to optimize the control of the membrane separation process and thus ensure the membrane performance.
文摘In rapid thermal processing of a semiconductor wafer, it is important to keep a given temperature rising speed of the wafer during the temperature rising process. We made an experimental apparatus to measure the temperature rising speed of a ceramic ball of 2 mm in diameter heated with four halogen lamp heaters. The heating rate of the halogen lamp heaters was controlled by computer to keep a given temperature rising speed of 50 ℃/s with a controlling time interval of 0.1 s. We examined the effect of various heating control methods on the error of the temperature rising speed of the ceramic ball. We found that a combined method of control with prepared correlation and PID （proportional integral derivative） control is a good method to decrease the error of the temperature rising speed. The average error of the temperature rising speed is 0.5 ℃/s, and the repetition error is almost zero for the temperature rising speed of 50 ℃/s from 330 ℃ to 370 ℃. We also measured the effects of artificial control delay time and measuring error of the monitoring temperature on the error of the temperature rising speed.
基金Project Supported by Education Department of Liaoning Province(LT2012005)
文摘After heat is metered in each house unit,the heating system is regulated by variable flow.The temperature of the return w ater is controlled to regulate the flow to realize the temperature regulation.According to the characteristics of the temperature control w ith big inertia,pure time-delay and degeneration,a fuzzy adaptive PID controller is designed w ith the advantages of the fuzzy control and PID algorithm,and the simulation model is established according to the characteristics of heating metering system.Simulation results show that the fuzzy adaptive PID controller proposed has small overshoot,short oscillation cycle,high precision and strong anti-jamming capability in comparison w ith conventional PID controller,w hich could meet the requirement of the dynamic and steady-state performance of the heating process.
