The two control methods, namely the general-control and the quadrature-control modes for HRG under force-rebalance mode were introduced firstly. Then the azimuth of antinode on the hemispherical resonator was deduced....The two control methods, namely the general-control and the quadrature-control modes for HRG under force-rebalance mode were introduced firstly. Then the azimuth of antinode on the hemispherical resonator was deduced. The dynamics equations of resonator under the nonuniformity of density distribution were established by way of Bubonov-Galerkin method which is commonly used for solution of differential equations, and the state equation was established through the dynamics equations. The analytic solutions of the vibration displacement and the velocity were achieved by solving the state equation, and then the ratio of rebalance excitation to primary excitation was derived under the two working modes, thus the estimation of input angular rate of HRG were obtained. By comparing and calculating these two modes, the error caused by resonator's machining defects can be greatly inhibited under quadrature-control, and the fourth harmonic density error's tolerance were calculated to ensure the accuracy of HRG under these two modes.展开更多
As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance ...As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance of such components.Hence,ultra-precision grinding experiments are carried out to investigate the surface/subsurface quality of the hemispherical resonator machined by the small ball-end fine diamond grinding wheel.The influence of grinding parameters on the surface roughness(SR)and SSD depth of fused silica samples is then analyzed.The experimental results indicate that the SR and SSD depth decreased with the increase of grinding speed and the decrease of feed rate and grinding depth.In addition,based on the material strain rate and the maximum undeformed chip thickness,the effect of grinding parameters on the subsurface damage mechanism of fused silica samples is analyzed.Furthermore,a multi-step ultra-precision grinding technique of the hemispherical resonator is proposed based on the interaction influence between grinding depth and feed rate.Finally,the hemispherical resonator is processed by the proposed grinding technique,and the SR is improved from 454.328 nm to 110.449 nm while the SSD depth is reduced by 94%from 40μm to 2.379μm.The multi-step grinding technique proposed in this paper can guide the fabrication of the hemispherical resonator.展开更多
This paper makes detailed analyses tor the flexural vibration (frequency) of the hemispherical shell and presents the varying laws of frequency with the rarving boundary angles and the wall thickness of the above shel...This paper makes detailed analyses tor the flexural vibration (frequency) of the hemispherical shell and presents the varying laws of frequency with the rarving boundary angles and the wall thickness of the above shell, It is an important value to develop the instrument, such as hemispherical resonator gyro (HRG), whose sensing component is a hemispherical shell.展开更多
The mass non-uniformity of hemispherical resonator is one of reasons for frequency split,and frequency split can cause gyroscope to drift.Therefore,it is of great significance to analyze the relationship between mass ...The mass non-uniformity of hemispherical resonator is one of reasons for frequency split,and frequency split can cause gyroscope to drift.Therefore,it is of great significance to analyze the relationship between mass non-uniformity and frequency split,which can provide a theoretical basis for mass balance of imperfect resonator.The starting point of error mechanism analysis for gyroscope is the motion equations of resonator.Firstly,based on the Kirchhoff-Love hypothesis in the elastic thin shell theory,the geometric deformation equations of resonator are deduced.Secondly,the deformation energy equation of resonator is derived according to the vibration mode and relationship between the stress and strain of hemispherical thin shell.Thirdly,the kinetic energy equation of resonator is deduced by the Coriolis theorem.Finally,the motion equations of resonator are established by the Lagrange mechanics principle.The theoretical values of precession factor and natural frequency are calculated by the motion equations,which are substantially consistent with the ones by the finite element method and practical measurement,the errors are within a reasonable range.Simultaneously,the varying trend of natural frequency with respect to the geometrical and physical parameters of resonator by the motion equations is consistent with that by the finite element analysis.The above conclusions prove the correctness and rationality of motion equations.Similarly,the motion equations of resonator with mass non-uniformity are established by the same modeling method in case of ignoring the input angular rate and damping,and the state equations with respect to the velocity and displacement of vibration system are derived,then twonatural frequencies are solved by the characteristic equation.It is concluded that one of reasons for frequency split is the 4 th harmonic of mass non-uniformity,and thus much attention should be paid to minimizing the 4 th harmonic of mass non-uniformity in the course of mass balancing for imperfect resonator.展开更多
Hemispherical Resonator Gyroscope(HRG)is a classical high precision Coriolis Vibration Gyroscope(CVG),which performs attitude estimation of carrier by detecting the precession of standing wave of resonator,thus,the dr...Hemispherical Resonator Gyroscope(HRG)is a classical high precision Coriolis Vibration Gyroscope(CVG),which performs attitude estimation of carrier by detecting the precession of standing wave of resonator,thus,the drift of standing wave of resonator has a great influence on the output accuracy of gyroscope,where the quality factor non-uniformity of resonator is one of main error sources.Ring electrode is a classical excitation structure of HRG because the standing wave can precess freely under its excitation,which makes the gyroscope have more accurate scale factor,larger measurement range and better dynamic characteristics.In this paper,the equations of motion of an ideal resonator excited by a ring electrode are derived by the elastic thin shell theory and Lagrange mechanical principle,then the corresponding equivalent mechanical model is established.According to the“average method”,it can be seen that the ideal resonator excited by the ring electrode works in integral mode,and any position in the circumferential direction of resonator can be a working point,which means that the quality factor non-uniformity has a great effect on the drift of standing wave.Therefore,the equations of motion of resonator with quality factor non-uniformity under the ring electrode excitation are deduced by the equivalent mechanical model,and the drift model of standing wave is established by the“average method”,it can be found that both the amplitude of quality factor non-uniformity and angle between the“inherent damping axis”and antinode axis of standing wave can affect the drift rate of standing wave.Moreover,the drift model indicates that if the input angular rate does not reach the threshold,the precession angular rate of standing wave will appear“self-locking”phenomenon,that is,the gyroscope will lose the integral effect.展开更多
Maximizing quality factor (Q) is essential to improve the performance of micro hemispherical shell resonators (μHSRs) which can be used in microelectromechanical system (MEMS) gyroscopes to measure angular rotation.S...Maximizing quality factor (Q) is essential to improve the performance of micro hemispherical shell resonators (μHSRs) which can be used in microelectromechanical system (MEMS) gyroscopes to measure angular rotation.Several energy dissipation mechanisms limit Q,where thermoelastic dissipation (TED) is the major one and studied in this paper.Fully coupled thermo-mechanical equations for calculating TED are formulated,and then temperature distribution in a deformed μHSR and its quality factor related to TED (QTED) are obtained by solving the equations through a finite-element method (FEM).It has been found that different fabrication process conditions can obtain various geometrical parameters in our previous studies.In order to provide guidelines for the design and fabrication of μHSRs,the effects of their geometry on resonant frequency (f0) and QTED are studied.The change of anchor height and small enough anchor radius have no effect on both f0 and QTED,but the shell size including its radius,thickness and height has significant impact on f0 and QTED.It is found that whether a μHSR has lower f0 and higher QTED or higher f0 and higher QTED can be achieved by changing these geometrical parameters.The results presented in this paper can also be applied to other similar resonators.展开更多
Hemispherical shell resonator(HSR)is the core component of hemispherical resonator gyro.It is aφ-shaped small-bore complex component with minimum curvature radius less than 3 mm.Thus,traditional polishing methods are...Hemispherical shell resonator(HSR)is the core component of hemispherical resonator gyro.It is aφ-shaped small-bore complex component with minimum curvature radius less than 3 mm.Thus,traditional polishing methods are difficult to polish it.Small ball-end magnetorheological polishing method can polish the small components with complicated three-dimensional surface and obtain non-destructive surface.Therefore,this method is suitable for polishing HSR.However,the material removal rate of the ordinary small ball-end magnetorheological polishing is low,leading to long polishing time and low output of HSR.To solve this problem,a water bath heating assisted small ball-end magnetorheological polishing method is proposed in this research.The influence rule of processing parameters on the material removal rate is studied experimentally.A set of optimal processing parameters is obtained to maximize the material removal rate.Compared with the ordinary method,the material removal rate of the new method can be improved by 143%.Subsequently,an HSR is polished by the new method.The results show that the polishing time can be reduced by 55%,and the polished surface roughness can reach 7.7 nm.The new method has the great potential to be used in actual production to improve the polishing efficiency of HSR.展开更多
BACKGROUND Currently,adolescent depression is one of the most significant public health concerns,markedly influencing emotional,cognitive,and social maturation.Despite advancements in distinguish the neurobiological s...BACKGROUND Currently,adolescent depression is one of the most significant public health concerns,markedly influencing emotional,cognitive,and social maturation.Despite advancements in distinguish the neurobiological substrates underlying depression,the intricate patterns of disrupted brain network connectivity in adolescents warrant further exploration.AIM To elucidate the neural correlates of adolescent depression by examining brain network connectivity using resting-state functional magnetic resonance imaging(rs-fMRI).METHODS The study cohort comprised 74 depressed adolescents and 59 healthy controls aged 12 to 17 years.Participants underwent rs-fMRI to evaluate functional connectivity within and across critical brain networks,including the visual,default mode network(DMN),dorsal attention,salience,somatomotor,and frontoparietal control networks.RESULTS Analyses revealed pronounced functional disparities within key neural circuits among adolescents with depression.The results demonstrated existence of hemispheric asymmetries characterized by enhanced activity in the left visual network,which contrasted the diminished activity in the right hemisphere.The DMN facilitated increased activity within the left prefrontal cortex and reduced engagement in the right hemisphere,implicating disrupted self-referential and emotional processing mechanisms.Additionally,an overactive right dorsal attention network and a hypoactive salience network were identified,underscoring significant abnormalities in attentional and emotional regulation in adolescent depression.CONCLUSION The findings from this study underscore distinct neural connectivity disruptions in adolescent depression,underscoring the critical role of specific neurobiological markers for precise early diagnosis of adolescent depression.The observed functional asymmetries and network-specific deviations elucidate the complex neurobiological architecture of adolescent depression,supporting the development of targeted therapeutic strategies.展开更多
Aphasia is an acquired language disorder that is a common consequence of stroke.The pathogenesis of the disease is not fully understood,and as a result,current treatment options are not satisfactory.Here,we used blood...Aphasia is an acquired language disorder that is a common consequence of stroke.The pathogenesis of the disease is not fully understood,and as a result,current treatment options are not satisfactory.Here,we used blood oxygenation level-dependent functional magnetic resonance imaging to evaluate the activation of bilateral cortices in patients with Broca＇s aphasia 1 to 3 months after stroke.Our results showed that language expression was associated with multiple brain regions in which the right hemisphere participated in the generation of language.The activation areas in the left hemisphere of aphasia patients were significantly smaller compared with those in healthy adults.The activation frequency,volumes,and intensity in the regions related to language,such as the left inferior frontal gyrus（Broca＇s area）,the left superior temporal gyrus,and the right inferior frontal gyrus（the mirror region of Broca＇s area）,were lower in patients compared with healthy adults.In contrast,activation in the right superior temporal gyrus,the bilateral superior parietal lobule,and the left inferior temporal gyrus was stronger in patients compared with healthy controls.These results suggest that the right inferior frontal gyrus plays a role in the recovery of language function in the subacute stage of stroke-related aphasia by increasing the engagement of related brain areas.展开更多
The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology...The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology is proposed.This method is based on femtosecond laser-assisted chemical etching.First,the optimal energy range of femtosecond laser modification is obtained through mechanism analysis.Second,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing spacing.The results demonstrate why edge breakage in rounded corners is easy under different parameters.Finally,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 million.In addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer level.The improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.展开更多
A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve t...A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve the resonators with good shell shape. The typical shell diameter is about 4 mm and its thickness covers from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the thickness.The corrosion solutions with different ratios of HF solution to NH4 F solution make the spherical shells rougher in different degrees. The best roughness is 0.581 nm in the 1 : 8 ratio corrosion solution while the original roughness is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch(BOE)technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell at ambient pressure and room temperature is 1.75 k Hz of rocking mode which is close to the simulated frequency.Using such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.展开更多
基金Sponsored by the National Defense Advanced Research Project(Grant No.51309050601)
文摘The two control methods, namely the general-control and the quadrature-control modes for HRG under force-rebalance mode were introduced firstly. Then the azimuth of antinode on the hemispherical resonator was deduced. The dynamics equations of resonator under the nonuniformity of density distribution were established by way of Bubonov-Galerkin method which is commonly used for solution of differential equations, and the state equation was established through the dynamics equations. The analytic solutions of the vibration displacement and the velocity were achieved by solving the state equation, and then the ratio of rebalance excitation to primary excitation was derived under the two working modes, thus the estimation of input angular rate of HRG were obtained. By comparing and calculating these two modes, the error caused by resonator's machining defects can be greatly inhibited under quadrature-control, and the fourth harmonic density error's tolerance were calculated to ensure the accuracy of HRG under these two modes.
基金This work was supported by the National Key Research and Development Program of China(No.2022YFB3403600)the National Natural Science Foundation of China(No.52293403)Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(No.SKLRS202204C).
文摘As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance of such components.Hence,ultra-precision grinding experiments are carried out to investigate the surface/subsurface quality of the hemispherical resonator machined by the small ball-end fine diamond grinding wheel.The influence of grinding parameters on the surface roughness(SR)and SSD depth of fused silica samples is then analyzed.The experimental results indicate that the SR and SSD depth decreased with the increase of grinding speed and the decrease of feed rate and grinding depth.In addition,based on the material strain rate and the maximum undeformed chip thickness,the effect of grinding parameters on the subsurface damage mechanism of fused silica samples is analyzed.Furthermore,a multi-step ultra-precision grinding technique of the hemispherical resonator is proposed based on the interaction influence between grinding depth and feed rate.Finally,the hemispherical resonator is processed by the proposed grinding technique,and the SR is improved from 454.328 nm to 110.449 nm while the SSD depth is reduced by 94%from 40μm to 2.379μm.The multi-step grinding technique proposed in this paper can guide the fabrication of the hemispherical resonator.
基金Projected supported by the National Natural Science Foundation of China
文摘This paper makes detailed analyses tor the flexural vibration (frequency) of the hemispherical shell and presents the varying laws of frequency with the rarving boundary angles and the wall thickness of the above shell, It is an important value to develop the instrument, such as hemispherical resonator gyro (HRG), whose sensing component is a hemispherical shell.
基金the Pre-Research Fund during the“13th Five-Year Plan” (No. 41417060101)。
文摘The mass non-uniformity of hemispherical resonator is one of reasons for frequency split,and frequency split can cause gyroscope to drift.Therefore,it is of great significance to analyze the relationship between mass non-uniformity and frequency split,which can provide a theoretical basis for mass balance of imperfect resonator.The starting point of error mechanism analysis for gyroscope is the motion equations of resonator.Firstly,based on the Kirchhoff-Love hypothesis in the elastic thin shell theory,the geometric deformation equations of resonator are deduced.Secondly,the deformation energy equation of resonator is derived according to the vibration mode and relationship between the stress and strain of hemispherical thin shell.Thirdly,the kinetic energy equation of resonator is deduced by the Coriolis theorem.Finally,the motion equations of resonator are established by the Lagrange mechanics principle.The theoretical values of precession factor and natural frequency are calculated by the motion equations,which are substantially consistent with the ones by the finite element method and practical measurement,the errors are within a reasonable range.Simultaneously,the varying trend of natural frequency with respect to the geometrical and physical parameters of resonator by the motion equations is consistent with that by the finite element analysis.The above conclusions prove the correctness and rationality of motion equations.Similarly,the motion equations of resonator with mass non-uniformity are established by the same modeling method in case of ignoring the input angular rate and damping,and the state equations with respect to the velocity and displacement of vibration system are derived,then twonatural frequencies are solved by the characteristic equation.It is concluded that one of reasons for frequency split is the 4 th harmonic of mass non-uniformity,and thus much attention should be paid to minimizing the 4 th harmonic of mass non-uniformity in the course of mass balancing for imperfect resonator.
文摘Hemispherical Resonator Gyroscope(HRG)is a classical high precision Coriolis Vibration Gyroscope(CVG),which performs attitude estimation of carrier by detecting the precession of standing wave of resonator,thus,the drift of standing wave of resonator has a great influence on the output accuracy of gyroscope,where the quality factor non-uniformity of resonator is one of main error sources.Ring electrode is a classical excitation structure of HRG because the standing wave can precess freely under its excitation,which makes the gyroscope have more accurate scale factor,larger measurement range and better dynamic characteristics.In this paper,the equations of motion of an ideal resonator excited by a ring electrode are derived by the elastic thin shell theory and Lagrange mechanical principle,then the corresponding equivalent mechanical model is established.According to the“average method”,it can be seen that the ideal resonator excited by the ring electrode works in integral mode,and any position in the circumferential direction of resonator can be a working point,which means that the quality factor non-uniformity has a great effect on the drift of standing wave.Therefore,the equations of motion of resonator with quality factor non-uniformity under the ring electrode excitation are deduced by the equivalent mechanical model,and the drift model of standing wave is established by the“average method”,it can be found that both the amplitude of quality factor non-uniformity and angle between the“inherent damping axis”and antinode axis of standing wave can affect the drift rate of standing wave.Moreover,the drift model indicates that if the input angular rate does not reach the threshold,the precession angular rate of standing wave will appear“self-locking”phenomenon,that is,the gyroscope will lose the integral effect.
基金the National Natural Science Foundation of China(No.61574093)the National Key Laboratory of Science and Technology on Nano/Micro Fabrication(No.614280504010317)+1 种基金the Aerospace Science and Technology Innovation Fund(No.16GFZJJ01-309),the Space Advanced Technology Joint Research Innovation Fund(No.USCAST2016-5)the Professional Technical Service Platform of Shanghai(No.19DZ2291103)。
文摘Maximizing quality factor (Q) is essential to improve the performance of micro hemispherical shell resonators (μHSRs) which can be used in microelectromechanical system (MEMS) gyroscopes to measure angular rotation.Several energy dissipation mechanisms limit Q,where thermoelastic dissipation (TED) is the major one and studied in this paper.Fully coupled thermo-mechanical equations for calculating TED are formulated,and then temperature distribution in a deformed μHSR and its quality factor related to TED (QTED) are obtained by solving the equations through a finite-element method (FEM).It has been found that different fabrication process conditions can obtain various geometrical parameters in our previous studies.In order to provide guidelines for the design and fabrication of μHSRs,the effects of their geometry on resonant frequency (f0) and QTED are studied.The change of anchor height and small enough anchor radius have no effect on both f0 and QTED,but the shell size including its radius,thickness and height has significant impact on f0 and QTED.It is found that whether a μHSR has lower f0 and higher QTED or higher f0 and higher QTED can be achieved by changing these geometrical parameters.The results presented in this paper can also be applied to other similar resonators.
基金supported by the National Key Research and Development Program of China(No.2022YFB3403600)the National Natural Science Foundation of China(No.52293403)Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(No.SKLRS202204C)。
文摘Hemispherical shell resonator(HSR)is the core component of hemispherical resonator gyro.It is aφ-shaped small-bore complex component with minimum curvature radius less than 3 mm.Thus,traditional polishing methods are difficult to polish it.Small ball-end magnetorheological polishing method can polish the small components with complicated three-dimensional surface and obtain non-destructive surface.Therefore,this method is suitable for polishing HSR.However,the material removal rate of the ordinary small ball-end magnetorheological polishing is low,leading to long polishing time and low output of HSR.To solve this problem,a water bath heating assisted small ball-end magnetorheological polishing method is proposed in this research.The influence rule of processing parameters on the material removal rate is studied experimentally.A set of optimal processing parameters is obtained to maximize the material removal rate.Compared with the ordinary method,the material removal rate of the new method can be improved by 143%.Subsequently,an HSR is polished by the new method.The results show that the polishing time can be reduced by 55%,and the polished surface roughness can reach 7.7 nm.The new method has the great potential to be used in actual production to improve the polishing efficiency of HSR.
基金Supported by the Medical Research Project of the Chongqing Municipal Health Commission,No.2024WSJK110.
文摘BACKGROUND Currently,adolescent depression is one of the most significant public health concerns,markedly influencing emotional,cognitive,and social maturation.Despite advancements in distinguish the neurobiological substrates underlying depression,the intricate patterns of disrupted brain network connectivity in adolescents warrant further exploration.AIM To elucidate the neural correlates of adolescent depression by examining brain network connectivity using resting-state functional magnetic resonance imaging(rs-fMRI).METHODS The study cohort comprised 74 depressed adolescents and 59 healthy controls aged 12 to 17 years.Participants underwent rs-fMRI to evaluate functional connectivity within and across critical brain networks,including the visual,default mode network(DMN),dorsal attention,salience,somatomotor,and frontoparietal control networks.RESULTS Analyses revealed pronounced functional disparities within key neural circuits among adolescents with depression.The results demonstrated existence of hemispheric asymmetries characterized by enhanced activity in the left visual network,which contrasted the diminished activity in the right hemisphere.The DMN facilitated increased activity within the left prefrontal cortex and reduced engagement in the right hemisphere,implicating disrupted self-referential and emotional processing mechanisms.Additionally,an overactive right dorsal attention network and a hypoactive salience network were identified,underscoring significant abnormalities in attentional and emotional regulation in adolescent depression.CONCLUSION The findings from this study underscore distinct neural connectivity disruptions in adolescent depression,underscoring the critical role of specific neurobiological markers for precise early diagnosis of adolescent depression.The observed functional asymmetries and network-specific deviations elucidate the complex neurobiological architecture of adolescent depression,supporting the development of targeted therapeutic strategies.
基金supported by the Natural Science Foundation of Guangdong Province of China,No.2016A030313327the Science and Technology Planning Project of Guangzhou City of China,No.201607010185+1 种基金the Science and Technology Planning Project of Guangdong Province of China,No.2016A020215226the National Natural Science Foundation of China,No.81401869
文摘Aphasia is an acquired language disorder that is a common consequence of stroke.The pathogenesis of the disease is not fully understood,and as a result,current treatment options are not satisfactory.Here,we used blood oxygenation level-dependent functional magnetic resonance imaging to evaluate the activation of bilateral cortices in patients with Broca＇s aphasia 1 to 3 months after stroke.Our results showed that language expression was associated with multiple brain regions in which the right hemisphere participated in the generation of language.The activation areas in the left hemisphere of aphasia patients were significantly smaller compared with those in healthy adults.The activation frequency,volumes,and intensity in the regions related to language,such as the left inferior frontal gyrus（Broca＇s area）,the left superior temporal gyrus,and the right inferior frontal gyrus（the mirror region of Broca＇s area）,were lower in patients compared with healthy adults.In contrast,activation in the right superior temporal gyrus,the bilateral superior parietal lobule,and the left inferior temporal gyrus was stronger in patients compared with healthy controls.These results suggest that the right inferior frontal gyrus plays a role in the recovery of language function in the subacute stage of stroke-related aphasia by increasing the engagement of related brain areas.
基金supported by the National Natural Science Foundation of China Regional Innovation and Development Joint Fund Key Support Project(Grant No.U21A20505)the National Natural Science Foundation of China(Grant Nos.62204261 and 52205613)。
文摘The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology is proposed.This method is based on femtosecond laser-assisted chemical etching.First,the optimal energy range of femtosecond laser modification is obtained through mechanism analysis.Second,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing spacing.The results demonstrate why edge breakage in rounded corners is easy under different parameters.Finally,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 million.In addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer level.The improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.
基金the National Natural Science Foundation of China(No.61574093)the Program for New Century Excellent Talents in University of Ministry of Education of China(No.NCET-10-0583)+2 种基金the Science Fund Program(No.2013ZC57003)the Pre-research Fund(No.9140A14010511JW0304)the Fund of National Key Laboratory of Science and Technology on Nano/Micro Fabrication,Shanghai Jiao Tong University(No.9140C790405110C7904)
文摘A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve the resonators with good shell shape. The typical shell diameter is about 4 mm and its thickness covers from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the thickness.The corrosion solutions with different ratios of HF solution to NH4 F solution make the spherical shells rougher in different degrees. The best roughness is 0.581 nm in the 1 : 8 ratio corrosion solution while the original roughness is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch(BOE)technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell at ambient pressure and room temperature is 1.75 k Hz of rocking mode which is close to the simulated frequency.Using such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.
