In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeco...In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeconventional micro-machining techniques,3D printing offers versatility in material selection,such as polymers.3Dprinting technology has been gradually applied to the general field of microelectronic devices such as sensors,actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturingprocesses.Furthermore,3D printing technology has also been instrumental in the fabrication of microfluidic devices,both through direct and indirect processes.This paper provides an overview of the evolving landscape of 3D printingtechnology,delineating the essential materials and processes involved in fabricating microelectronic and microfluidicdevices in recent times.Additionally,it synthesizes the diverse applications of these technologies across differentdomains.展开更多
文摘In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeconventional micro-machining techniques,3D printing offers versatility in material selection,such as polymers.3Dprinting technology has been gradually applied to the general field of microelectronic devices such as sensors,actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturingprocesses.Furthermore,3D printing technology has also been instrumental in the fabrication of microfluidic devices,both through direct and indirect processes.This paper provides an overview of the evolving landscape of 3D printingtechnology,delineating the essential materials and processes involved in fabricating microelectronic and microfluidicdevices in recent times.Additionally,it synthesizes the diverse applications of these technologies across differentdomains.
